Invention Application
- Patent Title: HYDROGEN BARRIER FOR FERROELECTRIC CAPACITORS
- Patent Title (中): 用于电容器的氢阻隔器
-
Application No.: US12718691Application Date: 2010-03-05
-
Publication No.: US20110062550A1Publication Date: 2011-03-17
- Inventor: Kezhakkedath R. Udayakumar , Scott R. Summerfelt , Ted S. Moise , Manoj K. Jain
- Applicant: Kezhakkedath R. Udayakumar , Scott R. Summerfelt , Ted S. Moise , Manoj K. Jain
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Main IPC: H01L29/92
- IPC: H01L29/92 ; H01L21/02
Abstract:
An integrated circuit containing a FeCap array. The FeCap array is at least partially surrounded on the sides by hydrogen barrier walls and on the top by a hydrogen barrier top plate. A method for at least partially enclosing a FeCap array with hydrogen barrier walls and a hydrogen barrier top plate.
Public/Granted literature
- US08440508B2 Hydrogen barrier for ferroelectric capacitors Public/Granted day:2013-05-14
Information query
IPC分类:
