发明申请
- 专利标题： DELAMINATION AND CRACK RESISTANT IMAGE SENSOR STRUCTURES AND METHODS
- 专利标题（中）： 分层和抗裂图像传感器结构与方法
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申请号： US13025681申请日： 2011-02-11
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公开(公告)号： US20110129955A1公开(公告)日： 2011-06-02
- 发明人: Jeffrey P. Gambino , Mark D. Jaffe , Robert K. Leidy , Charles F. Musante , Richard J. Rassel
- 申请人： Jeffrey P. Gambino , Mark D. Jaffe , Robert K. Leidy , Charles F. Musante , Richard J. Rassel
- 申请人地址： US NY Armonk
- 专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址： US NY Armonk
- 主分类号： H01L31/0232
- IPC分类号： H01L31/0232
摘要：
A plurality of image sensor structures and a plurality of methods for fabricating the plurality of image sensor structures provide for inhibited cracking and delamination of a lens capping layer with respect to a planarizing layer within the plurality of image sensor structures. Particular image sensor structures and related methods include at least one dummy lens layer of different dimensions than active lens layer located over a circuitry portion of a substrate within the particular image sensor structures. Additional particular image sensor structures include at least one of an aperture within the planarizing layer and a sloped endwall of the planarizing layer located over a circuitry portion within the particular image sensor structures.
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