发明申请
- 专利标题: TWO-CHAMBER SYSTEM AND METHOD FOR SERIAL BONDING AND EXFOLIATION OF MULTIPLE WORKPIECES
- 专利标题(中): 用于多个工件的串联和分离的两个室系统和方法
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申请号: US12636410申请日: 2009-12-11
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公开(公告)号: US20110143520A1公开(公告)日: 2011-06-16
- 发明人: Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Kirk G. Liebscher , John M. Alexander , Keenan Leon Guerrero
- 申请人: Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Kirk G. Liebscher , John M. Alexander , Keenan Leon Guerrero
- 申请人地址: US CA San Jose
- 专利权人: TWIN CREEKS TECHNOLOGIES, INC.
- 当前专利权人: TWIN CREEKS TECHNOLOGIES, INC.
- 当前专利权人地址: US CA San Jose
- 主分类号: H01L21/70
- IPC分类号: H01L21/70 ; H01L21/677 ; H01L21/673
摘要:
A system for treating distinct batches of workpieces to serial procedures comprises first and second multi-site structures. In each multi-site structure the sites are rotatable for alignment in turn with loading and unloading stations together constituting treatment or process stations. Workpieces of a batch are loaded onto all of the treatment sites and then simultaneously and identically treated by operation of treatment stations with which the process sites are aligned. After treatment in the first structure, workpieces of a batch are transferred from the unloading stations of the first structure to the loading stations of the second structure for further processing.
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