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公开(公告)号：US08207047B2
公开(公告)日：2012-06-26
申请号：US12636490
申请日：2009-12-11
Applicant: Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Keenan Leon Guerrero , Harish K. Bolla , Aditya Agarwal
Inventor： Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Keenan Leon Guerrero , Harish K. Bolla , Aditya Agarwal
IPC: H01L21/30
CPC classification number: H01L21/68728 , H01L21/67766 , H01L21/67781
Abstract: A system for simultaneously treating multiple workpieces is configured with treatment sites, configured to hold respective workpieces, fixed on a rotatable base. Treatment stations are equipped with respective active components operable simultaneously to treat respective workpieces identically on respective aligned treatment sites. For loading and unloading the treatment sites are rotated through distinct loading and unloading stations of the treatment stations which allow loading of a second batch while a first batch is being unloaded.
Abstract translation: 用于同时处理多个工件的系统被配置有处理部位，其被配置为保持固定在可旋转底座上的各个工件。 处理站配备有可同时操作的相应活动部件，以在相应的对准的处理部位上相同地处理相应的工件。 对于装载和卸载，处理站点通过处理站的不同装载和卸载站进行旋转，允许在第一批卸载时加载第二批料。
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公开(公告)号：US08151852B2
公开(公告)日：2012-04-10
申请号：US12495114
申请日：2009-06-30
Applicant: Steven M. Zuniga , Robert D. Tolles , Derek G. Aqui , Andrew J. Nagengast , Anthony J. Senn , Keenan Leon Guerrero
Inventor： Steven M. Zuniga , Robert D. Tolles , Derek G. Aqui , Andrew J. Nagengast , Anthony J. Senn , Keenan Leon Guerrero
IPC: B32B37/00
CPC classification number: B32B37/003 , B32B37/10 , B32B37/1009 , B32B38/004 , B32B2309/60 , B32B2309/68 , B32B2457/14 , H01L21/67092 , H01L21/67748 , H01L21/6875
Abstract: A bonding apparatus and method holds first and second bodies peripherally, one above the other, on respective shelves. A lower heat-transfer body is configured to lift the first body from below and press the first and second bodies against an upper heat-transfer body to enable bonding between the first and second bodies.
Abstract translation: 接合装置和方法将第一和第二主体周边地彼此上下放置在相应的搁架上。 下部传热体构造成从下方提升第一体，并且将第一和第二体压靠在上部传热体上，以使第一和第二体之间的粘结。
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公开(公告)号：US20110140334A1
公开(公告)日：2011-06-16
申请号：US12636328
申请日：2009-12-11
Applicant: Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Keenan Leon Guerrero , Harish K. Bolla , Aditya Agarwal
Inventor： Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Keenan Leon Guerrero , Harish K. Bolla , Aditya Agarwal
IPC: B23Q3/00
CPC classification number: H01L21/68728 , H01L21/6719 , H01L21/68707 , H01L21/68764 , H01L21/68771
Abstract: A system for simultaneously treating multiple workpieces is configured with sites, configured to hold respective workpieces, affixed on a rotatable base. Each site has a shelf accommodating an interior space and may be positioned by base rotation in alignment with a station of fixed location. Each station is equipped with an active component. The active components are movable simultaneously within respective stations into the respective interior spaces of respective aligned sites.
Abstract translation: 用于同时处理多个工件的系统被配置有被固定在可旋转底座上的各个工件的位置。 每个场地具有容纳内部空间的搁架，并且可以通过基座旋转定位成与固定位置的工位对准。 每个车站都配有一个有源组件。 有源部件可以在相应的站内同时移动到各个对准的位置的相应的内部空间中。
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4.发明申请TWO-CHAMBER SYSTEM AND METHOD FOR SERIAL BONDING AND EXFOLIATION OF MULTIPLE WORKPIECES 有权用于多个工件的串联和分离的两个室系统和方法公开(公告)号：US20110143520A1
公开(公告)日：2011-06-16
申请号：US12636410
申请日：2009-12-11
Applicant: Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Kirk G. Liebscher , John M. Alexander , Keenan Leon Guerrero
Inventor： Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Kirk G. Liebscher , John M. Alexander , Keenan Leon Guerrero
IPC: H01L21/70 , H01L21/677 , H01L21/673
CPC classification number: H01L21/67092 , H01L21/67766 , H01L21/67781 , H01L21/68728 , H01L21/68771
Abstract: A system for treating distinct batches of workpieces to serial procedures comprises first and second multi-site structures. In each multi-site structure the sites are rotatable for alignment in turn with loading and unloading stations together constituting treatment or process stations. Workpieces of a batch are loaded onto all of the treatment sites and then simultaneously and identically treated by operation of treatment stations with which the process sites are aligned. After treatment in the first structure, workpieces of a batch are transferred from the unloading stations of the first structure to the loading stations of the second structure for further processing.
Abstract translation: 用于将不同批次的工件处理为串行程序的系统包括第一和第二多站点结构。 在每个多站点结构中，站点可旋转以依次与装载站和卸载站一起构成处理站或处理站。 将批料的工件加载到所有处理部位上，然后通过与处理部位对齐的处理站的操作同时并且相同地处理。 在第一结构中处理之后，批次的工件从第一结构的卸载站传送到第二结构的装载站，用于进一步处理。
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公开(公告)号：US20100330776A1
公开(公告)日：2010-12-30
申请号：US12495114
申请日：2009-06-30
Applicant: Steven M. Zuniga , Robert D. Tolles , Derek G. Aqui , Andrew J. Nagengast , Anthony J. Senn , Keenan Leon Guerrero
Inventor： Steven M. Zuniga , Robert D. Tolles , Derek G. Aqui , Andrew J. Nagengast , Anthony J. Senn , Keenan Leon Guerrero
CPC classification number: B32B37/003 , B32B37/10 , B32B37/1009 , B32B38/004 , B32B2309/60 , B32B2309/68 , B32B2457/14 , H01L21/67092 , H01L21/67748 , H01L21/6875
Abstract: A bonding apparatus and method holds first and second bodies peripherally, one above the other, on respective shelves. A lower heat-transfer body is configured to lift the first body from below and press the first and second bodies against an upper heat-transfer body to enable bonding between the first and second bodies.
Abstract translation: 接合装置和方法将第一和第二主体周边地彼此上下放置在相应的搁架上。 下部传热体构造成从下方提升第一体，并且将第一和第二体压靠在上部传热体上，以使第一和第二体之间的粘结。
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Patent Agency Ranking
公开(公告)号：US20110143521A1
公开(公告)日：2011-06-16
申请号：US12636490
申请日：2009-12-11
Applicant: Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Keenan Leon Guerrero , Harish K. Bolla , Aditya Agarwal
Inventor： Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Keenan Leon Guerrero , Harish K. Bolla , Aditya Agarwal
IPC: H01L21/30 , H01L21/677
CPC classification number: H01L21/68728 , H01L21/67766 , H01L21/67781
Abstract: A system for simultaneously treating multiple workpieces is configured with treatment sites, configured to hold respective workpieces, fixed on a rotatable base. Treatment stations are equipped with respective active components operable simultaneously to treat respective workpieces identically on respective aligned treatment sites. For loading and unloading the treatment sites are rotated through distinct loading and unloading stations of the treatment stations which allow loading of a second batch while a first batch is being unloaded.
Abstract translation: 用于同时处理多个工件的系统被配置有处理部位，其被配置为保持固定在可旋转底座上的各个工件。 处理站配备有可同时操作的相应活动部件，以在相应的对准的处理部位上相同地处理相应的工件。 对于装载和卸载，处理站点通过处理站的不同装载和卸载站进行旋转，允许在第一批卸载时加载第二批料。
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公开(公告)号：US5436465A
公开(公告)日：1995-07-25
申请号：US60904
申请日：1993-05-13
Applicant: Peter G. Borden , Hung H. Quach , Derek G. Aqui
Inventor： Peter G. Borden , Hung H. Quach , Derek G. Aqui
CPC classification number: G01N21/53
Abstract: An apparatus and a method provide a modular design for a particle monitor of external design used in a vacuum process equipment. In one embodiment, the key elements, i.e. laser assembly, the detection module, the beam stop and a darkened surface opposite the detection module, can be independently mounted on a pump line. The particle monitors of the present invention can be mounted on both straight sections and bends of the pump line. Each key element can be accessed independently of other key elements for repair and service.
Abstract translation: 一种设备和方法为真空处理设备中使用的外部设计的粒子监测器提供了模块化设计。 在一个实施例中，关键元件，即激光组件，检测模块，光束挡块和与检测模块相对的变暗表面可以独立地安装在泵管线上。 本发明的颗粒监测器可以安装在泵管的直线段和弯管上。 每个关键元素可以独立于其他关键元素进行修复和维护。
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公开(公告)号：US5534706A
公开(公告)日：1996-07-09
申请号：US207329
申请日：1994-03-07
Applicant: Peter G. Borden , Derek G. Aqui , Matt A. Evanko
Inventor： Peter G. Borden , Derek G. Aqui , Matt A. Evanko
CPC classification number: G01N15/02
Abstract: A method for accomplishing particle monitoring above the throttle valve of a turbo pump provides a particle sensor which is built into the throttle valve in such a way that it is insensitive to local plasma glows. Furthermore, the particle sensor is placed such that a particle monitoring laser beam of the particle sensor is offset from the centerline of the pipe, so as to maximize exposure to process gas flow which is diverted to the periphery of the pipe by the position of a butterfly valve plate.
Abstract translation: 在涡轮泵的节气门上方实现颗粒监测的方法提供了一种内置在节流阀中的颗粒传感器，使得其对局部等离子体发光不敏感。 此外，粒子传感器被放置成使得粒子传感器的粒子监测激光束偏离管道的中心线，以便最大程度地暴露于通过位置的管道的转移到管道的周围的处理气体流 蝶阀板。
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公开(公告)号：US08545660B1
公开(公告)日：2013-10-01
申请号：US13424984
申请日：2012-03-20
Applicant: Steven M. Zuniga , Robert D. Tolles , Derek G. Aqui , Andrew J. Nagengast , Anthony J. Senn , Keenan Leon Guerrero
Inventor： Steven M. Zuniga , Robert D. Tolles , Derek G. Aqui , Andrew J. Nagengast , Anthony J. Senn , Keenan Leon Guerrero
IPC: B32B37/00
CPC classification number: B32B37/003 , B32B37/10 , B32B37/1009 , B32B38/004 , B32B2309/60 , B32B2309/68 , B32B2457/14 , H01L21/67092 , H01L21/67748 , H01L21/6875
Abstract: A bonding apparatus and method holds first and second bodies peripherally, one above the other, on respective shelves. A lower heat-transfer body is configured to lift the first body from below and press the first and second bodies against an upper heat-transfer body to enable bonding between the first and second bodies.
Abstract translation: 接合装置和方法将第一和第二主体周边地彼此上下放置在相应的搁架上。 下部传热体构造成从下方提升第一体，并且将第一和第二体压靠在上部传热体上，以使第一和第二体之间的粘结。
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公开(公告)号：US08360409B2
公开(公告)日：2013-01-29
申请号：US12636328
申请日：2009-12-11
Applicant: Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Keenan Leon Guerrero , Harish K. Bolla , Aditya Agarwal
Inventor： Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Keenan Leon Guerrero , Harish K. Bolla , Aditya Agarwal
IPC: B23Q3/00
CPC classification number: H01L21/68728 , H01L21/6719 , H01L21/68707 , H01L21/68764 , H01L21/68771
Abstract: A system for simultaneously treating multiple workpieces is configured with sites, configured to hold respective workpieces, affixed on a rotatable base. Each site has a shelf accommodating an interior space and may be positioned by base rotation in alignment with a station of fixed location. Each station is equipped with an active component. The active components are movable simultaneously within respective stations into the respective interior spaces of respective aligned sites.
Abstract translation: 用于同时处理多个工件的系统被配置有被固定在可旋转底座上的各个工件的位置。 每个场地具有容纳内部空间的搁架，并且可以通过基座旋转定位成与固定位置的工位对准。 每个车站都配有一个有源组件。 有源部件可以在相应的站内同时移动到各个对准的位置的相应的内部空间中。
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