公开(公告)号：US20130203205A1

公开(公告)日：2013-08-08

申请号：US13425877

申请日：2012-03-21

申请人： Venkatesan Murali ,  Arvind Chari ,  Gopal Prabhu ,  Christopher J. Petti

发明人： Venkatesan Murali ,  Arvind Chari ,  Gopal Prabhu ,  Christopher J. Petti

IPC分类号： H01L31/0232

CPC分类号： H01L27/14632 ,  H01L21/6835 ,  H01L27/1464 ,  H01L27/14687 ,  H01L31/103 ,  H01L31/1896 ,  Y02E10/50

摘要： A method for fabricating a backside-illuminated sensor includes providing a thin film semiconductor lamina having a first conductivity, and forming a doped region having a second conductivity within the lamina and at a front surface of the lamina. The lamina may be provided as a free-standing lamina, or may be provided as a semiconductor donor body from which the lamina is cleaved. An electrical connection is formed to the doped region. A temporary carrier is contacted to the back surface of the semiconductor and later removed. A backside-illuminated sensor is fabricated from the semiconductor lamina, in which the thickness of the semiconductor lamina remains substantially unchanged during the fabrication process.

摘要翻译： 一种用于制造背面照射传感器的方法包括提供具有第一导电性的薄膜半导体薄片，以及在薄层内和薄片的前表面处形成具有第二导电性的掺杂区域。 层可以提供为独立的层，或者可以提供为半导体施主体，层从其中被切割。 与掺杂区形成电连接。 临时载体与半导体的后表面接触并稍后移除。 背面照明的传感器由半导体层制成，其中半导体层的厚度在制造过程中保持基本上不变。

公开(公告)号：US20130200497A1

公开(公告)日：2013-08-08

申请号：US13558836

申请日：2012-07-26

申请人： Venkatesan Murali ,  Thomas Edward Dinan, JR. ,  Steve Bababyan ,  Gopal Prabhu ,  Christopher J. Petti

发明人： Venkatesan Murali ,  Thomas Edward Dinan, JR. ,  Steve Bababyan ,  Gopal Prabhu ,  Christopher J. Petti

IPC分类号： H01L21/20 ,  H01L29/06

CPC分类号： H01L29/06 ,  H01L21/265

摘要： The invention provides a method of forming an electronic device from a lamina that has a coefficient of thermal expansion that is matched or nearly matched to a constructed metal support. In some embodiments the method comprises implanting the top surface of a donor body with an ion dosage to form a cleave plane followed by exfoliating a lamina from the donor body. After exfoliating the lamina, a flexible metal support that has a coefficient of thermal expansion with a value that is within 10% of the value of the coefficient of thermal expansion of the lamina is constructed on the lamina. In some embodiments the coefficients of thermal expansion of the metal support and the lamina are within 10% or within 5% of each other between the temperatures of 500 and 1050° C.

摘要翻译： 本发明提供了一种从薄片形成电子器件的方法，其具有与构造的金属支撑件匹配或接近匹配的热膨胀系数。 在一些实施方案中，该方法包括用离子剂量植入供体体的顶表面以形成切割平面，随后从供体体剥离薄片。 在剥离层之后，在层板上形成具有热膨胀系数为10％以内的层的热膨胀系数的柔性金属支撑体。 在一些实施例中，金属载体和薄层的热膨胀系数在500和1050℃的温度之间彼此的10％或5％以内。

公开(公告)号：US20120146554A1

公开(公告)日：2012-06-14

申请号：US12962723

申请日：2010-12-08

申请人： Theodore H. Smick ,  Geoffrey Ryding ,  William H. Park ,  Ronald Horner

发明人： Theodore H. Smick ,  Geoffrey Ryding ,  William H. Park ,  Ronald Horner

IPC分类号： H05H7/22 ,  H02K16/00

CPC分类号： H05H5/04 ,  H02K11/0094 ,  H02K16/00 ,  H02K21/14 ,  H02M7/106

摘要： A d. c. charged particle accelerator comprises accelerator electrodes separated by insulating spacers defining acceleration gaps between adjacent pairs of electrodes. Individually regulated gap voltages are applied across each adjacent pair of accelerator electrodes. In embodiments, the individually regulated gap voltages are generated by electrically isolated alternators mounted on a common rotor shaft driven by an electric motor. Alternating power outputs from the alternators provide inputs to individual regulated d. c. power supplies to generate the gap voltages. The power supplies are electrically isolated and have outputs connected in series across successive pairs of accelerator electrodes. The described embodiment enables an ion beam to be accelerated to high energies and high beam currents, with good accelerator stability.

摘要翻译： 广告。 C。 带电粒子加速器包括通过绝缘垫片间隔开的加速器电极，其限定相邻电极对之间的加速间 单独调节的间隙电压施加在每个相邻的加速器电极对之间。 在实施例中，单独调节的间隙电压由安装在由电动机驱动的公共转子轴上的电隔离交流发电机产生。 交流发电机的交流电源输出为单独调节的d提供输入。 C。 电源产生间隙电压。 电源是电隔离的，并且具有串联连接成对的加速器电极的输出。 所描述的实施例使得能够将离子束加速到高能量和高束流，具有良好的加速器稳定性。

公开(公告)号：US08178419B2

公开(公告)日：2012-05-15

申请号：US12343420

申请日：2008-12-23

申请人： S. Brad Herner

发明人： S. Brad Herner

IPC分类号： H01L21/30

CPC分类号： H01L31/0236 ,  H01L31/02363 ,  H01L31/028 ,  H01L31/03921 ,  H01L31/1804 ,  H01L31/1892 ,  Y02E10/547 ,  Y02E10/548 ,  Y02P70/521

摘要： It is advantageous to create texture at the surface of a photovoltaic cell to reduce reflection and increase travel length of light within the cell. A method is disclosed to create texture at the surface of a silicon body by reacting a silicide-forming metal at the surface, where the silicide-silicon interface is non-planar, then stripping the silicide, leaving behind a textured surface. Depending on the metal and the conditions of silicide formation, the resulting surface may be faceted. The peak-to-valley height of this texturing will generally be between about 300 and about 5000 angstroms, which is well-suited for use in photovoltaic cells comprising a thin silicon lamina.

摘要翻译： 有利的是在光伏电池的表面处产生纹理以减少反射并增加电池内的光的行进长度。 公开了一种通过使表面处的硅化物形成金属（其中硅化物 - 硅界面是非平面的）反应然后剥离硅化物，留下纹理表面来在硅体的表面上产生纹理的方法。 取决于金属和硅化物形成的条件，所得到的表面可以是刻面的。 该纹理的峰谷高度通常在约300至约5000埃之间，这非常适用于包含薄硅层的光伏电池。

公开(公告)号：US08101488B1

公开(公告)日：2012-01-24

申请号：US12978558

申请日：2010-12-25

申请人： Theodore H. Smick ,  Steven Richards ,  Geoffrey Ryding ,  Kenneth H Purser

发明人： Theodore H. Smick ,  Steven Richards ,  Geoffrey Ryding ,  Kenneth H Purser

IPC分类号： H01L21/336 ,  H01L21/425

CPC分类号： H01J37/3171 ,  H01J2237/006 ,  H01J2237/08

摘要： Embodiments of the present invention provide for a system for accelerating hydrogen ions. A hydrogen generator holding a supply of water is configured to generate a flow of hydrogen gas from the supply of water. An ion source structure is configured to generate a plurality of hydrogen ions from the flow of hydrogen gas. An accelerator tube is configured to accelerate the plurality of hydrogen ions. The supply of water has an isotopic ratio of deuterium that is smaller than the isotopic ratio of deuterium in Vienna Standard Mean Ocean Water.

摘要翻译： 本发明的实施例提供一种用于加速氢离子的系统。 保持供水的氢发生器被配置为从水的供应产生氢气流。 离子源结构被配置为从氢气流中产生多个氢离子。 加速管构造成加速多个氢离子。 水的供应与氘的同位素比值小于维也纳标准平均海水中氘的同位素比。

公开(公告)号：US08058626B2

公开(公告)日：2011-11-15

申请号：US12703194

申请日：2010-02-10

申请人： Kenneth Harry Purser ,  William H. Park

发明人： Kenneth Harry Purser ,  William H. Park

IPC分类号： H01J37/317 ,  H01J3/26 ,  H01L21/265

CPC分类号： G21K1/093 ,  H01J37/12 ,  H01J37/153 ,  H01J37/3171 ,  H01J2237/1405 ,  H01J2237/1534 ,  H01J2237/30477

摘要： A ribbon-shaped ion beam having an elongate cross-section normal to a beam direction is modified by generating, at a predetermined position along the ribbon-shaped beam, a magnetic field extending in an x-direction along an x-axis. The x-direction magnetic field has a non-uniform intensity which is a desired function of x.

摘要翻译： 通过在沿着带状梁的预定位置处沿着x轴在x方向上延伸的磁场产生具有垂直于光束方向的细长横截面的带状离子束。 x方向磁场具有不均匀的强度，这是x的期望函数。

公开(公告)号：US20110237013A1

公开(公告)日：2011-09-29

申请号：US12729878

申请日：2010-03-23

申请人： Zhiyong Li ,  David Tanner ,  Gopalakrishna Prabhu ,  Mohamed H. Hilali

发明人： Zhiyong Li ,  David Tanner ,  Gopalakrishna Prabhu ,  Mohamed H. Hilali

IPC分类号： H01L31/18

CPC分类号： H01L31/02363 ,  H01L31/1892 ,  Y02E10/50

摘要： A novel method is described to create low-relief texture at a light-facing surface or a back surface of a photovoltaic cell. The peak-to-valley height and average peak-to-peak distance of the textured surface is less than about 1 microns, for example less than about 0.8 micron, for example about 0.5 microns or less. In a completed photovoltaic device, average reflectance for light having wavelength between 375 and 1010 nm at a light-facing surface with this texture is 6 percent or less, for example about 5 percent or less, in some instances about 3.5 percent. This texture is produced by forming an optional oxide layer at the surface, lightly buffing the surface, and etching with a crystallographically selective etch. Excellent texture may be produced by etching for as little as twelve minutes or less. Very little silicon, for example about 0.3 mg/cm2 or less, is lost at the textured surface during this etch.

摘要翻译： 描述了一种新颖的方法来在光伏电池的面向光的表面或背表面上产生低浮雕纹理。 纹理表面的峰 - 谷高度和平均峰 - 峰距离小于约1微米，例如小于约0.8微米，例如约0.5微米或更小。 在完成的光伏器件中，具有这种纹理的面向光的表面处于375nm和1010nm之间的波长的光的平均反射率为6％或更小，例如约5％或更小，在一些情况下为约3.5％。 通过在表面形成任选的氧化物层，轻轻抛光该表面，并用晶体学选择性蚀刻进行蚀刻来生产该织构。 可以通过蚀刻只要十二分钟或更短时间就可以产生良好的纹理。 在该蚀刻期间，非常小的硅，例如约0.3mg / cm 2或更小，在织构化表面处损失。

公开(公告)号：US20110076796A1

公开(公告)日：2011-03-31

申请号：US12571415

申请日：2009-09-30

申请人： S. Brad Herner ,  Mark H. Clark

发明人： S. Brad Herner ,  Mark H. Clark

IPC分类号： H01L31/18

CPC分类号： H01L31/0747 ,  H01L21/187 ,  H01L31/1804 ,  H01L31/1896 ,  Y02E10/547 ,  Y02P70/521

摘要： A donor silicon wafer may be bonded to a substrate and a lamina cleaved from the donor wafer. A photovoltaic cell may be formed from the lamina bonded to the substrate. An intermetal stack is described that is optimized for use in such a cell. The intermetal stack may include a transparent conductive oxide layer serving as a quarter-wave plate, a low resistance layer, an adhesion layer to help adhesion to the receiver element, and may also include a barrier layer to prevent or impede unwanted diffusion within the stack.

摘要翻译： 供体硅晶片可以结合到基底和从施主晶片分离的薄片。 可以从结合到衬底的薄片形成光伏电池。 描述了优化用于这种电池的金属间堆叠。 金属间堆叠可以包括用作四分之一波片的透明导电氧化物层，低电阻层，用于帮助粘附到接收器元件的粘合层，并且还可以包括防止或阻碍堆叠内的不期望扩散的阻挡层 。

公开(公告)号：US07915522B2

公开(公告)日：2011-03-29

申请号：US12130241

申请日：2008-05-30

申请人： Christopher J. Petti

发明人： Christopher J. Petti

IPC分类号： H02N6/00 ,  H01L31/042 ,  H01L31/00

CPC分类号： H01L31/02363 ,  H01L31/02167 ,  H01L31/02168 ,  Y02E10/50

摘要： A novel surface texturing provides improved light-trapping characteristics for photovoltaic cells. The surface is asymmetric and includes shallow slopes at between about 5 and about 30 degrees from horizontal as well as steeper slopes at about 70 degrees or more from horizontal. It is advantageously used as either the front or back surface of a thin semiconductor lamina, for example between about 1 and about 20 microns thick, which comprises at least the base or emitter of a photovoltaic cell. In embodiments of the present invention, the shallow slopes are formed using imprint photolithography.

摘要翻译： 新颖的表面纹理为光伏电池提供了改进的光捕获特性。 表面是不对称的，并且包括与水平方向在大约5度和大约30度之间的浅斜面以及从水平方向大约70度或更大的更陡峭的斜面。 它有利地用作薄半导体层的前表面或后表面，例如约1至约20微米厚，其至少包括光伏电池的基极或发射极。 在本发明的实施例中，使用压印光刻形成浅斜面。

公开(公告)号：US20100327190A1

公开(公告)日：2010-12-30

申请号：US12494270

申请日：2009-06-30

申请人： Hilton Glavish ,  Geoffrey Ryding ,  Theodore H. Smick ,  Kenneth Harry Purser

发明人： Hilton Glavish ,  Geoffrey Ryding ,  Theodore H. Smick ,  Kenneth Harry Purser

IPC分类号： H01J37/08

CPC分类号： H01J37/3171 ,  H01J37/05 ,  H01J37/08 ,  H01J37/20 ,  H01J2237/057 ,  H01J2237/061 ,  H01J2237/082 ,  H01J2237/166 ,  H01J2237/2001 ,  H01J2237/2006 ,  H01J2237/201 ,  H01J2237/202

摘要： A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis of rotation of the wheel is fixed and a ribbon beam of hydrogen ions is directed down on a peripheral edge of the wheel. The ribbon beam extends over the full radial width of wafers on the wheel. The beam is generated by an ion source providing an extracted ribbon beam having at least 100 mm major cross-sectional diameter. The ribbon beam may be passed through a 90° bending magnet which bends the beam in the plane of the ribbon. The magnet provides intensity correction across the ribbon to compensate for the dependency on the radial distance from the wheel axis of the speed at which parts of the wafers pass through the ribbon beam.

摘要翻译： 用于从硅晶片剥离硅的氢离子注入机使用大的扫描轮，围绕其周边承载50个以上的晶圆并围绕一个轴线旋转。 在一个实施例中，车轮的旋转轴线是固定的，并且带状的氢离子束被向下指向车轮的周缘。 带状束在轮上的晶片的整个径向宽度上延伸。 光束由离子源产生，提供具有至少100mm主横截面直径的抽出的带状束。 带状光束可以穿过将光束弯曲在色带平面中的90°弯曲磁体。 磁体在色带上提供强度校正，以补偿与轮轴的径向距离对晶圆部分通过带状束的速度的依赖性。