发明申请
- 专利标题： APPARATUS AND METHOD FOR SIMULTANEOUS TREATMENT OF MULTIPLE WORKPIECES
- 专利标题（中）： 用于同时处理多种工作的装置和方法
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申请号： US12636490申请日： 2009-12-11
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公开(公告)号： US20110143521A1公开(公告)日： 2011-06-16
- 发明人: Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Keenan Leon Guerrero , Harish K. Bolla , Aditya Agarwal
- 申请人： Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Keenan Leon Guerrero , Harish K. Bolla , Aditya Agarwal
- 申请人地址： US CA San Jose
- 专利权人： TWIN CREEKS TECHNOLOGIES, INC.
- 当前专利权人： TWIN CREEKS TECHNOLOGIES, INC.
- 当前专利权人地址： US CA San Jose
- 主分类号： H01L21/30
- IPC分类号： H01L21/30 ; H01L21/677
摘要：
A system for simultaneously treating multiple workpieces is configured with treatment sites, configured to hold respective workpieces, fixed on a rotatable base. Treatment stations are equipped with respective active components operable simultaneously to treat respective workpieces identically on respective aligned treatment sites. For loading and unloading the treatment sites are rotated through distinct loading and unloading stations of the treatment stations which allow loading of a second batch while a first batch is being unloaded.