公开(公告)号：US20110143521A1

公开(公告)日：2011-06-16

申请号：US12636490

申请日：2009-12-11

申请人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Keenan Leon Guerrero ,  Harish K. Bolla ,  Aditya Agarwal

发明人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Keenan Leon Guerrero ,  Harish K. Bolla ,  Aditya Agarwal

IPC分类号： H01L21/30 ,  H01L21/677

CPC分类号： H01L21/68728 ,  H01L21/67766 ,  H01L21/67781

摘要： A system for simultaneously treating multiple workpieces is configured with treatment sites, configured to hold respective workpieces, fixed on a rotatable base. Treatment stations are equipped with respective active components operable simultaneously to treat respective workpieces identically on respective aligned treatment sites. For loading and unloading the treatment sites are rotated through distinct loading and unloading stations of the treatment stations which allow loading of a second batch while a first batch is being unloaded.

摘要翻译： 用于同时处理多个工件的系统被配置有处理部位，其被配置为保持固定在可旋转底座上的各个工件。 处理站配备有可同时操作的相应活动部件，以在相应的对准的处理部位上相同地处理相应的工件。 对于装载和卸载，处理站点通过处理站的不同装载和卸载站进行旋转，允许在第一批卸载时加载第二批料。

公开(公告)号：US08207047B2

公开(公告)日：2012-06-26

申请号：US12636490

申请日：2009-12-11

申请人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Keenan Leon Guerrero ,  Harish K. Bolla ,  Aditya Agarwal

发明人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Keenan Leon Guerrero ,  Harish K. Bolla ,  Aditya Agarwal

IPC分类号： H01L21/30

CPC分类号： H01L21/68728 ,  H01L21/67766 ,  H01L21/67781

摘要： A system for simultaneously treating multiple workpieces is configured with treatment sites, configured to hold respective workpieces, fixed on a rotatable base. Treatment stations are equipped with respective active components operable simultaneously to treat respective workpieces identically on respective aligned treatment sites. For loading and unloading the treatment sites are rotated through distinct loading and unloading stations of the treatment stations which allow loading of a second batch while a first batch is being unloaded.

摘要翻译： 用于同时处理多个工件的系统被配置有处理部位，其被配置为保持固定在可旋转底座上的各个工件。 处理站配备有可同时操作的相应活动部件，以在相应的对准的处理部位上相同地处理相应的工件。 对于装载和卸载，处理站点通过处理站的不同装载和卸载站进行旋转，允许在第一批卸载时加载第二批料。

公开(公告)号：US20110140334A1

公开(公告)日：2011-06-16

申请号：US12636328

申请日：2009-12-11

申请人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Keenan Leon Guerrero ,  Harish K. Bolla ,  Aditya Agarwal

发明人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Keenan Leon Guerrero ,  Harish K. Bolla ,  Aditya Agarwal

IPC分类号： B23Q3/00

CPC分类号： H01L21/68728 ,  H01L21/6719 ,  H01L21/68707 ,  H01L21/68764 ,  H01L21/68771

摘要： A system for simultaneously treating multiple workpieces is configured with sites, configured to hold respective workpieces, affixed on a rotatable base. Each site has a shelf accommodating an interior space and may be positioned by base rotation in alignment with a station of fixed location. Each station is equipped with an active component. The active components are movable simultaneously within respective stations into the respective interior spaces of respective aligned sites.

摘要翻译： 用于同时处理多个工件的系统被配置有被固定在可旋转底座上的各个工件的位置。 每个场地具有容纳内部空间的搁架，并且可以通过基座旋转定位成与固定位置的工位对准。 每个车站都配有一个有源组件。 有源部件可以在相应的站内同时移动到各个对准的位置的相应的内部空间中。

公开(公告)号：US08360409B2

公开(公告)日：2013-01-29

申请号：US12636328

申请日：2009-12-11

申请人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Keenan Leon Guerrero ,  Harish K. Bolla ,  Aditya Agarwal

发明人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Keenan Leon Guerrero ,  Harish K. Bolla ,  Aditya Agarwal

IPC分类号： B23Q3/00

CPC分类号： H01L21/68728 ,  H01L21/6719 ,  H01L21/68707 ,  H01L21/68764 ,  H01L21/68771

摘要： A system for simultaneously treating multiple workpieces is configured with sites, configured to hold respective workpieces, affixed on a rotatable base. Each site has a shelf accommodating an interior space and may be positioned by base rotation in alignment with a station of fixed location. Each station is equipped with an active component. The active components are movable simultaneously within respective stations into the respective interior spaces of respective aligned sites.

摘要翻译： 用于同时处理多个工件的系统被配置有被固定在可旋转底座上的各个工件的位置。 每个场地具有容纳内部空间的搁架，并且可以通过基座旋转定位成与固定位置的工位对准。 每个车站都配有一个有源组件。 有源部件可以在相应的站内同时移动到各个对准的位置的相应的内部空间中。