Invention Application
- Patent Title: ELECTROPLATING CUP ASSEMBLY
- Patent Title (中): 电镀杯组装
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Application No.: US13154224Application Date: 2011-06-06
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Publication No.: US20110233056A1Publication Date: 2011-09-29
- Inventor: Robert Rash , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Tariq Majid , Jeff Hawkins , Seshasayee Varadarajan , Bryan Buckalew
- Applicant: Robert Rash , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Tariq Majid , Jeff Hawkins , Seshasayee Varadarajan , Bryan Buckalew
- Applicant Address: US CA San Jose
- Assignee: NOVELLUS SYSTEMS, INC.
- Current Assignee: NOVELLUS SYSTEMS, INC.
- Current Assignee Address: US CA San Jose
- Main IPC: C25D17/06
- IPC: C25D17/06 ; F16J15/02

Abstract:
Embodiments of a closed-contact electroplating cup are disclosed. One embodiment comprises a cup bottom comprising an opening, and a seal disposed on the cup bottom around the opening. The seal comprises a wafer-contacting peak located substantially at an inner edge of the seal. The embodiment also comprises an electrical contact structure disposed over a portion of the seal, wherein the electrical contact structure comprises an outer ring and a plurality of contacts extending inwardly from the outer ring, and wherein each contact has a generally flat wafer-contacting surface. The embodiment further comprises a wafer-centering mechanism configured to center a wafer in the cup.
Public/Granted literature
- US08377268B2 Electroplating cup assembly Public/Granted day:2013-02-19
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