发明申请
- 专利标题: ELECTROPLATING CUP ASSEMBLY
- 专利标题(中): 电镀杯组装
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申请号: US13154224申请日: 2011-06-06
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公开(公告)号: US20110233056A1公开(公告)日: 2011-09-29
- 发明人: Robert Rash , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Tariq Majid , Jeff Hawkins , Seshasayee Varadarajan , Bryan Buckalew
- 申请人: Robert Rash , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Tariq Majid , Jeff Hawkins , Seshasayee Varadarajan , Bryan Buckalew
- 申请人地址: US CA San Jose
- 专利权人: NOVELLUS SYSTEMS, INC.
- 当前专利权人: NOVELLUS SYSTEMS, INC.
- 当前专利权人地址: US CA San Jose
- 主分类号: C25D17/06
- IPC分类号: C25D17/06 ; F16J15/02
摘要:
Embodiments of a closed-contact electroplating cup are disclosed. One embodiment comprises a cup bottom comprising an opening, and a seal disposed on the cup bottom around the opening. The seal comprises a wafer-contacting peak located substantially at an inner edge of the seal. The embodiment also comprises an electrical contact structure disposed over a portion of the seal, wherein the electrical contact structure comprises an outer ring and a plurality of contacts extending inwardly from the outer ring, and wherein each contact has a generally flat wafer-contacting surface. The embodiment further comprises a wafer-centering mechanism configured to center a wafer in the cup.
公开/授权文献
- US08377268B2 Electroplating cup assembly 公开/授权日:2013-02-19
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