发明申请
- 专利标题: PROCESS VARIATION DETECTION APPARATUS AND PROCESS VARIATION DETECTION METHOD
- 专利标题(中): 过程变化检测装置和过程变化检测方法
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申请号: US12851547申请日: 2010-08-05
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公开(公告)号: US20110270555A1公开(公告)日: 2011-11-03
- 发明人: Ku-Feng Lin , Meng-Fan Chang , Shyh-Shyuan Sheu , Pei-Chia Chiang , Wen-Pin Lin , Chih-He Lin
- 申请人: Ku-Feng Lin , Meng-Fan Chang , Shyh-Shyuan Sheu , Pei-Chia Chiang , Wen-Pin Lin , Chih-He Lin
- 申请人地址: TW Hsinchu
- 专利权人: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 当前专利权人: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 当前专利权人地址: TW Hsinchu
- 优先权: TW99113704 20100429
- 主分类号: G06F19/00
- IPC分类号: G06F19/00 ; G01R19/00
摘要:
A process variation detection apparatus and a process variation detection method are provided. The process variation detection apparatus includes a process variation detector and a compensation signal generator. The process variation detector includes a first process variation detection component, a second process variation detection component and a current comparator. The channel of the first process variation detection component is a first conductive type, and the channel of the second process variation detection component is a second conductive type, wherein the above-mentioned first conductive type is different from the second conductive type. The current comparator is connected to the first process variation detection component and the second process variation detection component for comparing the current difference between the two components and outputting a current comparison result. The compensation signal generator is connected to the process variation detector, and produces a corresponding compensation signal according to the current comparison result.
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