Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
- Patent Title (中): 半导体器件及其制造方法
-
Application No.: US13108231Application Date: 2011-05-16
-
Publication No.: US20110284936A1Publication Date: 2011-11-24
- Inventor: Ju-il CHOI , Jae-hyun Phee , Hyu-ha Lee , Ho-jin Lee , Son-kwan Hwang
- Applicant: Ju-il CHOI , Jae-hyun Phee , Hyu-ha Lee , Ho-jin Lee , Son-kwan Hwang
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd
- Current Assignee: Samsung Electronics Co., Ltd
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2010-0046587 20100518
- Main IPC: H01L29/772
- IPC: H01L29/772 ; H01L23/48

Abstract:
A semiconductor device and a method of fabricating a semiconductor device. The semiconductor device includes an interlayer insulation layer pattern, a metal wire pattern exposed by a passage formed by a via hole formed in the interlayer insulation layer pattern to input and output an electrical signal, and a plated layer pattern directly contacting the metal wire pattern and filling the via hole. The method includes forming an interlayer insulation layer having a metal wire pattern to input and output an electrical signal formed therein, forming a via hole to define a passage that extends through the interlayer insulation layer until at least a part of the metal wire pattern is exposed, and forming a plated layer pattern to fill the via hole and to directly contact the metal wire pattern by using the metal wire pattern exposed through the via hole as a seed metal layer.
Public/Granted literature
- US08564102B2 Semiconductor device having through silicon via (TSV) Public/Granted day:2013-10-22
Information query
IPC分类: