发明申请
- 专利标题: METHOD FOR MANUFACTURING NONVOLATILE MEMORY DEVICE
- 专利标题(中): 制造非易失性存储器件的方法
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申请号: US13075658申请日: 2011-03-30
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公开(公告)号: US20110306199A1公开(公告)日: 2011-12-15
- 发明人: Yasuhiro NOJIRI , Hiroyuki Fukumizu , Shinichi Nakao , Kei Watanabe , Kazuhiko Yamamoto , Ichiro Mizushima , Yoshio Ozawa
- 申请人: Yasuhiro NOJIRI , Hiroyuki Fukumizu , Shinichi Nakao , Kei Watanabe , Kazuhiko Yamamoto , Ichiro Mizushima , Yoshio Ozawa
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-133411 20100610; JP2011-037238 20110223
- 主分类号: H01L21/768
- IPC分类号: H01L21/768 ; B82Y99/00
摘要:
According to one embodiment, a method is disclosed for manufacturing a nonvolatile memory device. The nonvolatile memory device includes a memory cell connected to a first interconnect and a second interconnect. The method can include forming a first electrode film on the first interconnect. The method can include forming a layer including a plurality of carbon nanotubes dispersed inside an insulator on the first electrode film. At least one carbon nanotube of the plurality of carbon nanotubes is exposed from a surface of the insulator. The method can include forming a second electrode film on the layer. In addition, the method can include forming a second interconnect on the second electrode film.
公开/授权文献
- US08455346B2 Method for manufacturing nonvolatile memory device 公开/授权日:2013-06-04
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