发明申请
US20110306199A1 METHOD FOR MANUFACTURING NONVOLATILE MEMORY DEVICE 有权
制造非易失性存储器件的方法

METHOD FOR MANUFACTURING NONVOLATILE MEMORY DEVICE
摘要:
According to one embodiment, a method is disclosed for manufacturing a nonvolatile memory device. The nonvolatile memory device includes a memory cell connected to a first interconnect and a second interconnect. The method can include forming a first electrode film on the first interconnect. The method can include forming a layer including a plurality of carbon nanotubes dispersed inside an insulator on the first electrode film. At least one carbon nanotube of the plurality of carbon nanotubes is exposed from a surface of the insulator. The method can include forming a second electrode film on the layer. In addition, the method can include forming a second interconnect on the second electrode film.
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