发明申请
- 专利标题: NONVOLATILE MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME
- 专利标题(中): 非易失性存储器件及其制造方法
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申请号: US13018765申请日: 2011-02-01
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公开(公告)号: US20120056145A1公开(公告)日: 2012-03-08
- 发明人: Kenji AOYAMA , Kazuhiko Yamamoto , Satoshi Ishikawa , Shigeto Oshino
- 申请人: Kenji AOYAMA , Kazuhiko Yamamoto , Satoshi Ishikawa , Shigeto Oshino
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-200620 20100908
- 主分类号: H01L45/00
- IPC分类号: H01L45/00 ; H01L21/02 ; B82Y40/00 ; B82Y30/00
摘要:
According to one embodiment, a nonvolatile memory device includes a selection element layer and a nanomaterial aggregate layer. The selection element layer includes silicon. The nanomaterial aggregate layer is stacked on the selection element layer. The nanomaterial aggregate layer includes a plurality of micro conductive bodies and fine particles dispersed in a plurality of gaps between the micro conductive bodies. At least a surface of the fine particle is made of an insulating material other than silicon oxide.
公开/授权文献
- US08507888B2 Nonvolatile memory device and method for manufacturing same 公开/授权日:2013-08-13
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