发明申请
- 专利标题： IMAGING OPTICS
- 专利标题（中）： 成像光学
-
申请号： US13438591申请日： 2012-04-03
-
公开(公告)号： US20120208115A1公开(公告)日： 2012-08-16
- 发明人: Ulrich Loering , Ralf Mueller , Hans-Juergen Mann , Norman Baer
- 申请人： Ulrich Loering , Ralf Mueller , Hans-Juergen Mann , Norman Baer
- 申请人地址： DE Oberkochen
- 专利权人： CARL ZEISS SMT GMBH
- 当前专利权人： CARL ZEISS SMT GMBH
- 当前专利权人地址： DE Oberkochen
- 优先权： DE102009046685.1 20091113
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G03B27/70 ; G02B5/08 ; F21V7/00 ; B82Y40/00
摘要：
An imaging optics includes a plurality of mirrors which reflect imaging light to image an object field in an object plane into an image field in an image plane. A mirror body of at least one of the mirrors has a through-opening for the imaging light to pass through. The through-opening has an internal region of a smallest opening width in the mirror body. The through-opening expands from the internal region towards both edge regions of the mirror body. A disturbing influence of unused light portions is reduced or eliminated completely.
公开/授权文献
- US09201226B2 Imaging optics 公开/授权日：2015-12-01
信息查询
IPC分类:
