公开(公告)号：US09201226B2

公开(公告)日：2015-12-01

申请号：US13438591

申请日：2012-04-03

申请人： Ulrich Loering ,  Ralf Mueller ,  Hans-Juergen Mann ,  Norman Baer

发明人： Ulrich Loering ,  Ralf Mueller ,  Hans-Juergen Mann ,  Norman Baer

IPC分类号： G03B27/54 ,  G02B17/06 ,  G02B5/00 ,  G02B27/00 ,  G03F7/20

CPC分类号： G02B17/0657 ,  G02B5/005 ,  G02B27/0018 ,  G03F7/70233 ,  G03F7/70275

摘要： An imaging optics includes a plurality of mirrors which reflect imaging light to image an object field in an object plane into an image field in an image plane. A mirror body of at least one of the mirrors has a through-opening for the imaging light to pass through. The through-opening has an internal region of a smallest opening width in the mirror body. The through-opening expands from the internal region towards both edge regions of the mirror body. A disturbing influence of unused light portions is reduced or eliminated completely.

摘要翻译： 成像光学器件包括多个反射镜，其反射成像光以将物平面中的物场成像到图像平面中的图像场。 至少一个反射镜的镜体具有用于成像光通过的通孔。 通孔具有镜体中最小开口宽度的内部区域。 通孔从内部区域向镜体的两个边缘区域扩展。 未使用的光部分的干扰影响被完全消除或消除。

公开(公告)号：US20120208115A1

公开(公告)日：2012-08-16

申请号：US13438591

申请日：2012-04-03

申请人： Ulrich Loering ,  Ralf Mueller ,  Hans-Juergen Mann ,  Norman Baer

发明人： Ulrich Loering ,  Ralf Mueller ,  Hans-Juergen Mann ,  Norman Baer

IPC分类号： G03F7/20 ,  G03B27/70 ,  G02B5/08 ,  F21V7/00 ,  B82Y40/00

CPC分类号： G02B17/0657 ,  G02B5/005 ,  G02B27/0018 ,  G03F7/70233 ,  G03F7/70275

摘要： An imaging optics includes a plurality of mirrors which reflect imaging light to image an object field in an object plane into an image field in an image plane. A mirror body of at least one of the mirrors has a through-opening for the imaging light to pass through. The through-opening has an internal region of a smallest opening width in the mirror body. The through-opening expands from the internal region towards both edge regions of the mirror body. A disturbing influence of unused light portions is reduced or eliminated completely.

摘要翻译： 成像光学器件包括多个反射镜，其反射成像光以将物平面中的物场成像到图像平面中的图像场。 至少一个反射镜的镜体具有用于成像光通过的通孔。 通孔具有镜体中最小开口宽度的内部区域。 通孔从内部区域向镜体的两个边缘区域扩展。 未使用的光部分的干扰影响被完全消除或消除。

公开(公告)号：US20100321649A1

公开(公告)日：2010-12-23

申请号：US12817915

申请日：2010-06-17

申请人： Norman Baer

发明人： Norman Baer

IPC分类号： G03B27/52 ,  G03B27/32

CPC分类号： G03F7/70958 ,  G02B5/0891 ,  G02B17/004 ,  G02B17/0892 ,  G03F7/70833 ,  G03F7/70891

摘要： An optical element embodied as a front surface mirror or as a lens wherein the optical element has at least one partial region composed of a material which has the property that the material is cooled upon irradiation with suitable excitation light.

摘要翻译： 实施为前表面镜或透镜的光学元件，其中光学元件具有至少一个部分区域，该部分区域由材料组成，该材料具有在用合适的激发光照射时材料被冷却的特性。

公开(公告)号：US20130176544A1

公开(公告)日：2013-07-11

申请号：US13784979

申请日：2013-03-05

申请人： Markus Hauf ,  Norman Baer ,  Holger Walter ,  Joachim Hartjes

发明人： Markus Hauf ,  Norman Baer ,  Holger Walter ,  Joachim Hartjes

IPC分类号： G03F7/20 ,  G01J5/02

CPC分类号： G03F7/70058 ,  G01J5/02 ,  G02B7/181 ,  G02B7/1815 ,  G03F7/70266 ,  G03F7/70891

摘要： The disclosure concerns an arrangement for mirror temperature measurement and/or thermal actuation of a mirror in a microlithographic projection exposure apparatus. The mirror has an optical effective surface and at least one access passage extending from a surface of the mirror, that does not correspond to the optical effective surface, in the direction of the effective surface. The arrangement is designed for mirror temperature measurement and/or thermal actuation of the mirror via electromagnetic radiation which is propagated along the access passage. The electromagnetic radiation is reflected a plurality of times within the access passage.