发明申请
- 专利标题: ELECTROMAGNETIC ACTUATOR, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS
- 专利标题(中): 电磁执行器,阶段装置和平面设备
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申请号: US13401560申请日: 2012-02-21
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公开(公告)号: US20120212723A1公开(公告)日: 2012-08-23
- 发明人: Sven Antoin Johan Hol , Jan Van Eijk , Johannes Petrus Martinus Bernardus Vermeulen , Gerard Johannes Pieter Nijsse , Simon Bernardus Cornelis Maria Martens , Yang-Shan Huang , Michael Wilhelmus Theodorus Koot , Jeroen De Boeij , Maarten Hartger Kimman , Wei Zhou
- 申请人: Sven Antoin Johan Hol , Jan Van Eijk , Johannes Petrus Martinus Bernardus Vermeulen , Gerard Johannes Pieter Nijsse , Simon Bernardus Cornelis Maria Martens , Yang-Shan Huang , Michael Wilhelmus Theodorus Koot , Jeroen De Boeij , Maarten Hartger Kimman , Wei Zhou
- 申请人地址: NL Veldhoven
- 专利权人: ASML NETHERLANDS B.V.
- 当前专利权人: ASML NETHERLANDS B.V.
- 当前专利权人地址: NL Veldhoven
- 主分类号: G03B27/54
- IPC分类号: G03B27/54 ; H01F27/28 ; G03B27/58 ; H01F27/24
摘要:
An electromagnetic actuator includes a first and second magnetic members that are displaceable relative to each other and are arranged to provide a magnetic circuit; and a coil configured to, in use, receive a current to generate a magnetic flux through the magnetic circuit, thereby generating a force between the first and second magnetic members in a first direction, the magnetic flux, in use, being transferred between the first and second magnetic members through a first surface of the first magnetic member and a second surface of the second magnetic member, the first and second surface being separated by an airgap, wherein the first surface and the second surface are arranged relative to each other such that an outer dimension of the first surface extends beyond an outer dimension of the second surface in a second direction substantially perpendicular to the first direction.
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