Lithographic apparatus and device manufacturing method
    3.
    发明申请
    Lithographic apparatus and device manufacturing method 审中-公开
    平版印刷设备和器件制造方法

    公开(公告)号:US20070281149A1

    公开(公告)日:2007-12-06

    申请号:US11447286

    申请日:2006-06-06

    IPC分类号: C09J5/00

    摘要: The present invention relates to a method of assembling an object that includes providing a first object part having a first surface, providing a second object part having a second surface, positioning the first and the second object parts such that the first and the second surfaces face each other, wherein a gap is defined between the first and the second surfaces, applying a glue to at least a part of the gap, holding the first object part and the second object part at a distance during a period of time, wherein the gap is substantially filled with the glue due to capillary action and/or gravity, and moving the first and the second object parts toward each other to reduce the distance between the first and the second surfaces.

    摘要翻译: 本发明涉及一种组装物体的方法,包括提供具有第一表面的第一物体部分,提供具有第二表面的第二物体部分,将第一和第二物体部分定位成使得第一和第二表面面对 彼此之间,在所述第一表面和所述第二表面之间限定间隙,在所述间隙的至少一部分上施加胶水,在一段时间内将所述第一物体部分和所述第二物体部分保持一定距离,其中所述间隙 由于毛细管作用和/或重力而基本上填充有胶水,并且使第一和第二物体部件朝向彼此移动以减小第一和第二表面之间的距离。