Invention Application
- Patent Title: Vertical Memory Devices
- Patent Title (中): 垂直存储器件
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Application No.: US13432485Application Date: 2012-03-28
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Publication No.: US20120256253A1Publication Date: 2012-10-11
- Inventor: Sung-Min Hwang , Woon-Kyung Lee , Young-Jin Kwon , Tae-Hee Lee , Hui-Chang Moon
- Applicant: Sung-Min Hwang , Woon-Kyung Lee , Young-Jin Kwon , Tae-Hee Lee , Hui-Chang Moon
- Priority: KR10-2011-0030998 20110405
- Main IPC: H01L29/78
- IPC: H01L29/78

Abstract:
Vertical memory devices include a channel, a ground selection line (GSL), a word line, a string selection line (SSL), a pad and an etch-stop layer. The channel extends in a first direction on a substrate. The channel includes an impurity region and the first direction is perpendicular to a top surface of the substrate. At least one GSL, a plurality of the word lines and at least one SSL are spaced apart from each other in the first direction on a sidewall of the channel. The pad is disposed on a top surface of the channel. The etch-stop layer contacts the pad.
Information query
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