发明申请
- 专利标题: Generation of Combinatorial Patterns by Deliberate Tilting of a Polymer-Pen Array
- 专利标题(中): 通过有意图倾斜聚合物笔阵列来产生组合模式
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申请号: US13513618申请日: 2010-12-02
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公开(公告)号: US20130040856A1公开(公告)日: 2013-02-14
- 发明人: Chad A. Mirkin , Adam B. Braunschweig , Jinan Chai , Dan J. Eichelsdoerfer , Louise R. Giam , Xing Liao , Lu Shin Wong
- 申请人: Chad A. Mirkin , Adam B. Braunschweig , Jinan Chai , Dan J. Eichelsdoerfer , Louise R. Giam , Xing Liao , Lu Shin Wong
- 申请人地址: US IL Evanston
- 专利权人: NORTHEWESTERN UNIVERSITY
- 当前专利权人: NORTHEWESTERN UNIVERSITY
- 当前专利权人地址: US IL Evanston
- 国际申请: PCT/US10/58773 WO 20101202
- 主分类号: C40B50/14
- IPC分类号: C40B50/14 ; C40B50/18 ; C40B40/18 ; C40B40/04 ; C40B30/08 ; C40B40/00 ; B82Y5/00
摘要:
The disclosure relates to a method of forming a pattern having pattern elements with a plurality of sizes on a substrate surface with a tilted pen array that includes choosing a tilt geometry for a pen array with respect to a substrate, inducing the tilt geometry between the pen array and the substrate surface, and forming a pattern having pattern elements on the substrate surface with the titled pen array, whereby the size of the formed pattern elements varies across the substrate surface along the tilted axis or axes. For example, the tilt geometry is in reference to the substrate surface and comprises a first angle with respect to a first axis of the substrate and a second angle with respect to a second axis of the substrate, the second axis being perpendicular to the first axis, and at least one of the first and second angles being non-zero.