发明申请
US20130264713A1 METHODS OF FORMING CONDUCTIVE STRUCTURES AND METHODS OF FORMING DRAM CELLS 有权
形成导电结构的方法和形成DRAM电池的方法

METHODS OF FORMING CONDUCTIVE STRUCTURES AND METHODS OF FORMING DRAM CELLS
摘要:
Some embodiments include methods of forming conductive structures. An electrically conductive material may be deposited with a first deposition method. The first deposition method has a first deposition rate and forms a first portion of a conductive structure. A second portion of the conductive structure may be formed by depositing the electrically conductive material with a second deposition method having a second deposition rate. The second deposition rate may be different from the first deposition rate by at least about a factor of 3. In some embodiments, a region of the conductive structure is utilized as a transistor gate of a DRAM cell. Some embodiments include semiconductor constructions.
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