Invention Application
- Patent Title: DIRECT CURRENT LAMP DRIVER FOR SUBSTRATE PROCESSING
- Patent Title (中): 直接电流灯驱动器用于基板处理
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Application No.: US13866505Application Date: 2013-04-19
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Publication No.: US20130287377A1Publication Date: 2013-10-31
- Inventor: OLEG SEREBRYANOV , JOSEPH M. RANISH , ALEXANDER GOLDIN
- Applicant: APPLIED MATERIALS, INC.
- Main IPC: H01L21/67
- IPC: H01L21/67

Abstract:
Methods and apparatus for heating a substrate in a process chamber are provided herein. In some embodiments, an apparatus for heating a substrate in a process chamber includes a lamp group comprising one or more sets of lamps to provide radiant energy to heat a substrate when disposed in the process chamber, wherein each set of lamps comprises a plurality of lamps wired in series, and wherein each set of lamps is wired in parallel with respect to other sets of the one or more sets of lamps; an alternating current (AC) power source to produce an AC input waveform; and a lamp driver to power the lamp group, the lamp driver including a rectifier coupled to the AC power source to convert the AC input waveform to DC voltage; and a direct current to direct current (DC/DC) converter to reduce voltage of the DC power.
Public/Granted literature
- US10734257B2 Direct current lamp driver for substrate processing Public/Granted day:2020-08-04
Information query
IPC分类: