公开(公告)号：US20130287377A1

公开(公告)日：2013-10-31

申请号：US13866505

申请日：2013-04-19

Applicant: APPLIED MATERIALS, INC.

Inventor： OLEG SEREBRYANOV ,  JOSEPH M. RANISH ,  ALEXANDER GOLDIN

IPC: H01L21/67

CPC classification number: H01L21/67115

Abstract: Methods and apparatus for heating a substrate in a process chamber are provided herein. In some embodiments, an apparatus for heating a substrate in a process chamber includes a lamp group comprising one or more sets of lamps to provide radiant energy to heat a substrate when disposed in the process chamber, wherein each set of lamps comprises a plurality of lamps wired in series, and wherein each set of lamps is wired in parallel with respect to other sets of the one or more sets of lamps; an alternating current (AC) power source to produce an AC input waveform; and a lamp driver to power the lamp group, the lamp driver including a rectifier coupled to the AC power source to convert the AC input waveform to DC voltage; and a direct current to direct current (DC/DC) converter to reduce voltage of the DC power.

Abstract translation: 本文提供了用于加热处理室中的衬底的方法和装置。 在一些实施例中，用于加热处理室中的衬底的装置包括灯组，其包括一组或多组灯，以在设置在处理室中时提供辐射能量以加热衬底，其中每组灯包括多个灯 串联连接，并且其中每组灯相对于所述一组或多组灯的其它组并联布线; 用于产生交流输入波形的交流（AC）电源; 以及灯驱动器，为所述灯组供电，所述灯驱动器包括耦合到所述AC电源的整流器，以将所述AC输入波形转换为DC电压; 以及直流直流（DC / DC）转换器以降低直流电力的电压。

公开(公告)号：US20150054404A1

公开(公告)日：2015-02-26

申请号：US14532895

申请日：2014-11-04

Applicant: APPLIED MATERIALS, INC.

Inventor： OLEG SEREBRYANOV ,  Alexander GOLDIN

IPC: H05B37/03

CPC classification number: H05B37/036 ,  H05B37/038

Abstract: Apparatus and methods for detecting lamp failure in a rapid thermal processing (RTP) tool are provided. Lamp failure detection systems are provided that can accommodate DC and/or AC voltages. The systems sample voltage signals along a circuit path formed by at least two serially connected lamps, calculate a voltage drop across the first lamp of the at least two serially connected lamps based on the sampled voltage signals, and determine whether a lamp failure has occurred based on a relationship between the voltage drop across the first lamp and a total voltage applied to the circuit path.

Abstract translation: 提供了一种用于在快速热处理（RTP）工具中检测灯泡故障的装置和方法。 提供可以适应直流和/或交流电压的灯故障检测系统。 所述系统沿着由至少两个串联连接的灯形成的电路路径采样电压信号，基于所采样的电压信号计算出至少两个串联灯的第一灯两端的电压降，并确定是否已经发生灯故障 关于第一灯上的电压降与施加到电路路径的总电压之间的关系。

公开(公告)号：US20140355972A1

公开(公告)日：2014-12-04

申请号：US14278621

申请日：2014-05-15

Applicant: APPLIED MATERIALS, INC.

Inventor： OLEG SEREBRYANOV

IPC: G01R19/02 ,  H05B3/00

CPC classification number: G01R19/02 ,  H01L21/67115 ,  H05B1/0233

Abstract: Methods and apparatus for determining the root-mean-square (RMS) voltage of an input voltage are provided herein. In some embodiments, an apparatus for determining the root-mean-square (RMS) voltage of an input voltage includes an amplifier to modify an amplitude of the input voltage signal; an amplitude detector, coupled to the amplifier, to transform the spectrum of the modified input voltage signal so that an increased portion of the signal is disposed within a desired frequency region; and a root-mean-square (RMS) converter, coupled to the amplitude detector, to determine the RMS voltage of the transformed input voltage signal, wherein a bandwidth of the RMS converter includes the desired frequency region.

Abstract translation: 本文提供了用于确定输入电压的均方根（RMS）电压的方法和装置。 在一些实施例中，用于确定输入电压的均方根（RMS）电压的装置包括：放大器，用于修改输入电压信号的幅度; 耦合到所述放大器的振幅检测器，用于变换所述经修改的输入电压信号的频谱，使得所述信号的增加部分设置在期望的频率区域内; 和均方根（RMS）转换器，其耦合到幅度检测器，以确定经变换的输入电压信号的RMS电压，其中RMS转换器的带宽包括期望的频率区域。