Invention Application
US20140080313A1 ETCHING COMPOSITION AND METHOD FOR ETCHING A SEMICONDUCTOR WAFER
审中-公开
蚀刻组合物和蚀刻半导体波长的方法
- Patent Title: ETCHING COMPOSITION AND METHOD FOR ETCHING A SEMICONDUCTOR WAFER
- Patent Title (中): 蚀刻组合物和蚀刻半导体波长的方法
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Application No.: US13725419Application Date: 2012-12-21
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Publication No.: US20140080313A1Publication Date: 2014-03-20
- Inventor: Sheng-Min YU , Wen-Ching SUN , Tai-Jui WANG , Yi-Fan CHEN , Chia-Liang SUN , Hao-Hsiang CHIANG , Pin-Guan LIAO , Chi-Fan CHIANG , Tzer-Shen LIN
- Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Applicant Address: TW Chutung
- Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee Address: TW Chutung
- Priority: TW101134424 20120920
- Main IPC: H01L21/306
- IPC: H01L21/306

Abstract:
An etching composition for a semiconductor wafer is provided, including 0.5-50 wt % base, 10-80 wt % alcohol, 0.01-15 wt % additive and water. A method for etching a semiconductor wafer is also provided. When the etching composition is applied to the entire surface or a partial surface of the semiconductor wafer at 60-200° C., the etching composition reacts on the semiconductor wafer to form a foam that etches the semiconductor wafer and includes a solid, a liquid and a gas. At the same time, the additive forms an oxide mask on the surface of the semiconductor wafer. Therefore, an excellent texture structure is formed on the surface of the semiconductor wafer, and a single surface of the semiconductor wafer is etched.
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