Invention Application
- Patent Title: METHODS AND MATERIALS FOR REMOVING METALS IN BLOCK COPOLYMERS
- Patent Title (中): 用于去除嵌段共聚物中金属的方法和材料
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Application No.: US14175203Application Date: 2014-02-07
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Publication No.: US20140151330A1Publication Date: 2014-06-05
- Inventor: Jian YIN , Hengpeng WU , Muthiah THIYAGARAJAN , SungEun HONG , Mark NEISSER , Yi CAO
- Applicant: Jian YIN , Hengpeng WU , Muthiah THIYAGARAJAN , SungEun HONG , Mark NEISSER , Yi CAO
- Applicant Address: US NJ SOMERVILLE
- Assignee: AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L.
- Current Assignee: AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L.
- Current Assignee Address: US NJ SOMERVILLE
- Main IPC: B05D5/00
- IPC: B05D5/00 ; B05D3/00 ; B05D1/00
Abstract:
The present invention relates to a method for treating a block copolymer solution, wherein the method comprises: providing a solution comprising a block copolymer in a non aqueous solvent; and, treating the solution to remove metals using an ion exchange resin. The invention also relates to a method of forming patterns using the treated block copolymer.
Public/Granted literature
- US09040659B2 Methods and materials for removing metals in block copolymers Public/Granted day:2015-05-26
Information query
