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    COMPOSITIONS OF NEUTRAL LAYER FOR DIRECTED SELF ASSEMBLY BLOCK COPOLYMERS AND PROCESSES THEREOF
    5.
    发明申请
    COMPOSITIONS OF NEUTRAL LAYER FOR DIRECTED SELF ASSEMBLY BLOCK COPOLYMERS AND PROCESSES THEREOF 有权
    用于方向自组装块状共聚物的中性层组成及其工艺

    公开(公告)号：US20140193754A1

    公开(公告)日：2014-07-10

    申请号：US14180848

    申请日：2014-02-14

    申请人： Hengpeng WU ,  Yi CAO ,  SungEun HONG ,  Jian YIN ,  Margareta PAUNESCU ,  Mark O. NEISSER ,  Guanyang LIN

    发明人： Hengpeng WU ,  Yi CAO ,  SungEun HONG ,  Jian YIN ,  Margareta PAUNESCU ,  Mark O. NEISSER ,  Guanyang LIN

    IPC分类号： G03F7/20

    CPC分类号： G03F7/20 ,  B82Y10/00 ,  B82Y40/00 ,  C08F212/08 ,  C08F212/32 ,  C08F220/14 ,  C08F293/00 ,  C08L53/00 ,  C09D125/14 ,  C09D125/16 ,  G03F7/0002 ,  G03F7/2037

    摘要： The present invention relates to novel neutral layer compositions and methods for using the neutral layer compositions for aligning microdomains of directed self-assembling block copolymers (BCP). The compositions and processes are useful for fabrication of electronic devices. The neutral layer composition comprises at least one random copolymer having at least one unit of structure (1), at least one unit of structure (2) and at least one unit of structure (3) where R1 is selected from the group consisting of a C1-C8 alkyl, C1-C8 fluoroalkyl moiety, C1-C8 partially fluorinated alkyl, C4-C8 cycloalkyl, C4-C8 cyclofluoroalkyl, C4-C8 partially fluorinated cycloalkyl, and a C2-C8 hydroxyalkyl; R2, R3 and R5 are independently selected from a group consisting of H, C1-C4 alkyl, CF3 and F; R4 is selected from the group consisting of H, C1-C8 alkyl, C1-C8 partially fluorinated alkyl and C1-C8 fluoroalkyl, n ranges from 1 to 5, R6 is selected from the group consisting of H, F, C1-C8 alkyl and a C1-C8 fluoroalkyl and m ranges from 1 to 3.

    摘要翻译： 本发明涉及新型中性层组合物和使用中性层组合物对准定向自组装嵌段共聚物（BCP）的微区的方法。 组合物和方法可用于制造电子装置。 中性层组合物包含至少一种具有至少一个结构单元（1），至少一个结构单元（2）和至少一个结构单元（3）的无规共聚物，其中R1选自 C 1 -C 8烷基，C 1 -C 8氟烷基部分，C 1 -C 8部分氟化烷基，C 4 -C 8环烷基，C 4 -C 8环氟烷基，C 4 -C 8部分氟化环烷基和C 2 -C 8羟烷基; R2，R3和R5独立地选自H，C1-C4烷基，CF3和F; R 4选自H，C 1 -C 8烷基，C 1 -C 8部分氟化烷基和C 1 -C 8氟代烷基，n为1至5，R 6选自H，F，C 1 -C 8烷基 和C 1 -C 8氟烷基，m为1至3。

    COMPOSITIONS OF NEUTRAL LAYER FOR DIRECTED SELF ASSEMBLY BLOCK COPOLYMERS AND PROCESSES THEREOF
    6.
    发明申请
    COMPOSITIONS OF NEUTRAL LAYER FOR DIRECTED SELF ASSEMBLY BLOCK COPOLYMERS AND PROCESSES THEREOF 有权
    用于方向自组装块状共聚物的中性层组成及其工艺

    公开(公告)号：US20130078576A1

    公开(公告)日：2013-03-28

    申请号：US13243640

    申请日：2011-09-23

    申请人： Hengpeng WU ,  Yi CAO ,  SungEun HONG ,  Jian YIN ,  Margareta PAUNESCU ,  Mark O. NEISSER ,  Guanyang LIN

    发明人： Hengpeng WU ,  Yi CAO ,  SungEun HONG ,  Jian YIN ,  Margareta PAUNESCU ,  Mark O. NEISSER ,  Guanyang LIN

    IPC分类号： G03F7/20 ,  C08L33/12

    CPC分类号： G03F7/20 ,  B82Y10/00 ,  B82Y40/00 ,  C08F212/08 ,  C08F212/32 ,  C08F220/14 ,  C08F293/00 ,  C08L53/00 ,  C09D125/14 ,  C09D125/16 ,  G03F7/0002 ,  G03F7/2037

    摘要： The present invention relates to novel neutral layer compositions and methods for using the compositions. The neutral layer composition comprises at least one random copolymer having at least one unit of structure (1), at least one unit of structure (2) and at least one unit of structure (3) where R1 is selected from the group consisting of a C1-C8 alkyl, C1-C8 fluoroalkyl moiety, C1-C8 partially fluorinated alkyl, C4-C8 cycloalkyl, C4-C8 cyclofluoroalkyl, C4-C8 partially fluorinated cycloalkyl, and a C2-C8 hydroxyalkyl; R2, R3 and R5 are independently selected from a group consisting of H, C1-C4 alkyl, CF3 and F; R4 is selected from the group consisting of H, C1-C8 alkyl, C1-C8 partially fluorinated alkyl and C1-C8 fluoroalkyl, n ranges from 1 to 5, R6 is selected from the group consisting of H, F, C1-C8 alkyl and a C1-C8 fluoroalkyl and m ranges from 1 to 3.

    摘要翻译： 本发明涉及新型中性层组合物和使用该组合物的方法。 中性层组合物包含至少一种具有至少一个结构单元（1），至少一个结构单元（2）和至少一个结构单元（3）的无规共聚物，其中R1选自 C 1 -C 8烷基，C 1 -C 8氟烷基部分，C 1 -C 8部分氟化烷基，C 4 -C 8环烷基，C 4 -C 8环氟烷基，C 4 -C 8部分氟化环烷基和C 2 -C 8羟烷基; R2，R3和R5独立地选自H，C1-C4烷基，CF3和F; R 4选自H，C 1 -C 8烷基，C 1 -C 8部分氟化烷基和C 1 -C 8氟代烷基，n为1至5，R 6选自H，F，C 1 -C 8烷基 和C 1 -C 8氟烷基，m为1至3。