发明申请
US20150236186A1 NANO AVALANCHE PHOTODIODE ARCHITECTURE FOR PHOTON DETECTION
有权
用于光子检测的NANO AVALANCHE光电建筑
- 专利标题: NANO AVALANCHE PHOTODIODE ARCHITECTURE FOR PHOTON DETECTION
- 专利标题(中): 用于光子检测的NANO AVALANCHE光电建筑
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申请号: US14185567申请日: 2014-02-20
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公开(公告)号: US20150236186A1公开(公告)日: 2015-08-20
- 发明人: NARSINGH B. SINGH , John V. Veliadis , Bettina Nechay , Andre Berghmans , David J. Knuteson , David Kahler , Brian Wagner , Marc Sherwin
- 申请人: NARSINGH B. SINGH , John V. Veliadis , Bettina Nechay , Andre Berghmans , David J. Knuteson , David Kahler , Brian Wagner , Marc Sherwin
- 申请人地址: US VA FALLS CHURCH
- 专利权人: NORTHROP GRUMMAN SYSTEMS CORPORATION
- 当前专利权人: NORTHROP GRUMMAN SYSTEMS CORPORATION
- 当前专利权人地址: US VA FALLS CHURCH
- 主分类号: H01L31/107
- IPC分类号: H01L31/107 ; H01L31/18 ; H01L27/144 ; H01L31/0336 ; H01L31/0232
摘要:
An integrated circuit includes a substrate material that includes an epitaxial layer, wherein the substrate material and the epitaxial layer form a first semiconductor material with the epitaxial layer having a first conductivity type. At least one nanowire comprising a second semiconductor material having a second conductivity type doped differently than the first conductivity type of the first semiconductor material forms a junction crossing region with the first semiconductor material. The nanowire and the first semiconductor material form an avalanche photodiode (APD) in the junction crossing region to enable single photon detection. In an alternative configuration, the APD is formed as a p-i-n crossing region where n represents an n-type material, i represents an intrinsic layer, and p represents a p-type material.
公开/授权文献
- US09570646B2 Nano avalanche photodiode architecture for photon detection 公开/授权日:2017-02-14
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