Invention Application
US20150241472A1 SYSTEMS AND METHODS FOR ON-WAFER DYNAMIC TESTING OF ELECTRONIC DEVICES
审中-公开
电子设备的静态动态测试系统和方法
- Patent Title: SYSTEMS AND METHODS FOR ON-WAFER DYNAMIC TESTING OF ELECTRONIC DEVICES
- Patent Title (中): 电子设备的静态动态测试系统和方法
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Application No.: US14625385Application Date: 2015-02-18
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Publication No.: US20150241472A1Publication Date: 2015-08-27
- Inventor: Kazuki Negishi , Eric Hill
- Applicant: Cascade Microtech, Inc.
- Main IPC: G01R1/04
- IPC: G01R1/04 ; G01R1/073 ; G01R31/26 ; G01R1/067

Abstract:
Systems and methods for on-wafer dynamic testing of electronic devices. The systems include a probe head assembly, a probe-side contacting structure, a chuck, and a chuck-side contacting structure. The probe head assembly includes a probe configured to electrically contact a first side of a device under test (DUT). The probe-side contacting structure includes a probe-side contacting region. The chuck includes an electrically conductive support surface configured to support a substrate that includes the DUT and to electrically contact a second side of the DUT. The probe head assembly and the chuck are configured to translate relative to one another to selectively establish electrical contact between the probe and the DUT. The chuck-side contacting structure includes a chuck-side contacting region that is in electrical communication with the electrically conductive support surface and opposed to the probe-side contacting structure. The methods may include methods of operating the system or systems.
Public/Granted literature
- US10281518B2 Systems and methods for on-wafer dynamic testing of electronic devices Public/Granted day:2019-05-07
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