Invention Application
- Patent Title: POLISHING COMPOSITION
- Patent Title (中): 抛光组合物
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Application No.: US14686285Application Date: 2015-04-14
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Publication No.: US20150291851A1Publication Date: 2015-10-15
- Inventor: Hiroshi ASANO , Maiko ASAI , Hitoshi MORINAGA , Kazusei TAMAI
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Kiyosu-shi
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Kiyosu-shi
- Priority: JP2014-083833 20140415
- Main IPC: C09G1/02
- IPC: C09G1/02 ; B24B1/00

Abstract:
A polishing composition which is able to decrease a difference in polishing rate between the alloy material and the resin, and to polish both the alloy material and the resin at a high polishing rate when polishing a substrate which contains an alloy material and a resin on the surface and has a ratio of the alloy material area to the total polishing area in a specific range is provided. To provide the polishing composition used to polish a substrate which contains an alloy material and a resin on a surface thereof and has a ratio of an alloy material area to a total polishing area of from 60 to 95%, the polishing composition containing crystalline abrasive grains having a cumulative 50% particle size (D50) based on a volume-based particle size distribution of 5.0 μm or more, an acid or a salt thereof and a water-soluble polymer.
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