发明申请
US20150299899A1 SUBSTRATE FOR EPITAXIAL GROWTH, MANUFACTURING METHOD THEREFOR, AND SUBSTRATE FOR SUPERCONDUCTING WIRE
审中-公开
用于外延生长的基板,其制造方法和用于超导线的基板
- 专利标题: SUBSTRATE FOR EPITAXIAL GROWTH, MANUFACTURING METHOD THEREFOR, AND SUBSTRATE FOR SUPERCONDUCTING WIRE
- 专利标题(中): 用于外延生长的基板,其制造方法和用于超导线的基板
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申请号: US14432827申请日: 2013-08-23
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公开(公告)号: US20150299899A1公开(公告)日: 2015-10-22
- 发明人: Takashi Koshiro , Hironao Okayama , Teppei Kurokawa , Kouji Nanbu
- 申请人: Toyo Kohan Co., Ltd. , Sumitomo Electric Industries, Ltd.
- 申请人地址: JP Tokyo JP Osaka
- 专利权人: Toyo Kohan Co., Ltd.,Sumitomo Electric Industries, Ltd.
- 当前专利权人: Toyo Kohan Co., Ltd.,Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JP Tokyo JP Osaka
- 优先权: JP2012-223187 20121005
- 国际申请: PCT/JP2013/072520 WO 20130823
- 主分类号: C30B29/22
- IPC分类号: C30B29/22 ; C30B23/02 ; C30B1/04 ; C22C9/00 ; H01L39/24 ; C22F1/08 ; H01B12/06 ; H01B13/00 ; C30B25/18 ; H01L39/12
摘要:
An objective of the present invention is to provide a copper substrate for epitaxial growth, which has higher biaxial crystal orientation, and a method for manufacturing the same. The substrate for epitaxial growth of the present invention contains a biaxially crystal-oriented copper layer, wherein the full width at half maximum Δφ of a peak based on the pole figure of the copper layer is within 5° and the tail width Δβ of the peak based on the pole figure is within 15° Such a substrate for epitaxial growth is manufactured by a 1st step of performing heat treatment of a copper layer so that Δφ is within 6° and the tail width Δβ is within 25°, and after the 1st step, a 2nd step of performing heat treatment of the copper layer at a temperature higher than the temperature for heat treatment in the 1st step, so that Δφ is within 5° and the tail width Δβ is within 15°.
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