Invention Application
US20160018267A1 Superconducting thermal detector (bolometer) of terahertz (sub-millimeter wave) radiation
审中-公开
太赫兹(亚毫米波)辐射超导热探测器(辐射热计)
- Patent Title: Superconducting thermal detector (bolometer) of terahertz (sub-millimeter wave) radiation
- Patent Title (中): 太赫兹(亚毫米波)辐射超导热探测器(辐射热计)
-
Application No.: US14773359Application Date: 2014-03-04
-
Publication No.: US20160018267A1Publication Date: 2016-01-21
- Inventor: Andrey Timofeev , Juha Hassel , Arttu Luukanen , Panu Helistö , Leif Grönberg
- Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
- Priority: FI20135212 20130305
- International Application: PCT/FI2014/050158 WO 20140304
- Main IPC: G01J5/20
- IPC: G01J5/20 ; H01L37/00

Abstract:
A superconducting thermal detector (bolometer) of THz (sub-millimeter) wave radiation based on sensing the change in the amplitude or phase of a resonator circuit, consisting of a capacitor (Csh) and a superconducting temperature dependent inductor where the said inductor is thermally isolated from the heat bath (chip substrate) by micro-suspensions. The bolometer design includes a thin film inductor located on the membrane, a single or/and multi-layered thin film capacitor, and a thin film absorber of incoming radiation. The bolometer design can also include a lithographic antenna with antenna termination and/or a back reflector beneath the membrane for optimal wavelength detection by the resonance circuit. The superconducting thermal detector (bolometer) and arrays of these detectors operate in a temperature range from 1 Kelvin to 10 Kelvin.
Public/Granted literature
- US10145743B2 Superconducting thermal detector (bolometer) of terahertz (sub-millimeter wave) radiation Public/Granted day:2018-12-04
Information query