公开(公告)号：US10811585B2

公开(公告)日：2020-10-20

申请号：US16082610

申请日：2017-03-03

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： Mika Prunnila ,  Jouni Ahopelto ,  Andrey Timofeev ,  Kestutis Grigoras ,  Andrey Shchepetov

IPC: H01L35/32 ,  H01L35/22 ,  G01J5/14 ,  G01J5/08 ,  G01J5/06 ,  G01J5/12

Abstract: A thermoelectric device (1) comprising a frame (2), a membrane (3) made of thermoelectric material, and an element (4) for absorbing or releasing energy. The element (4) is supported to the frame (2) solely by the membrane (3).

公开(公告)号：US11143557B2

公开(公告)日：2021-10-12

申请号：US16468851

申请日：2017-12-13

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： Juha Hassel ,  Hannu Sipola ,  Andrey Timofeev ,  Visa Vesterinen

IPC: G01J5/10

Abstract: A solution for reading detector arrays is disclosed. The solution comprises generating (400) an excitation signal, varying (402) the frequency of the excitation signal in time, supplying (404) the excitation signal to a detector array comprising a set of thermal detectors. The number of detectors corresponds to the frequencies of the excitation signal. In the solution, the signal is demodulated (406) at the output of the detector array and time-multiplexed base band signal is obtained. An analogue to digital conversion is performed (408) to the time-multiplexed base band signal and the base band signal is demultiplexed (410) to obtain a set of detector signals.

公开(公告)号：US10145743B2

公开(公告)日：2018-12-04

申请号：US14773359

申请日：2014-03-04

Applicant: Teknologian tutkimuskeskus VTT Oy

Inventor： Andrey Timofeev ,  Juha Hassel ,  Arttu Luukanen ,  Panu Helistö ,  Leif Grönberg

IPC: G01J5/20 ,  G01J5/02 ,  H01L37/00 ,  G01J5/10

Abstract: A superconducting thermal detector (bolometer) of THz (sub-millimeter) wave radiation based on sensing the change in the amplitude or phase of a resonator circuit, consisting of a capacitor (Csh) and a superconducting temperature dependent inductor where the said inductor is thermally isolated from the heat bath (chip substrate) by micro-suspensions. The bolometer design includes a thin film inductor located on the membrane, a single or/and multi-layered thin film capacitor, and a thin film absorber of incoming radiation. The bolometer design can also include a lithographic antenna with antenna termination and/or a back reflector beneath the membrane for optimal wavelength detection by the resonance circuit. The superconducting thermal detector (bolometer) and arrays of these detectors operate in a temperature range from 1 Kelvin to 10 Kelvin.

公开(公告)号：US20160018267A1

公开(公告)日：2016-01-21

申请号：US14773359

申请日：2014-03-04

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： Andrey Timofeev ,  Juha Hassel ,  Arttu Luukanen ,  Panu Helistö ,  Leif Grönberg

IPC: G01J5/20 ,  H01L37/00

CPC classification number: G01J5/20 ,  G01J5/024 ,  G01J2005/106 ,  G01J2005/208 ,  H01L37/00

Abstract: A superconducting thermal detector (bolometer) of THz (sub-millimeter) wave radiation based on sensing the change in the amplitude or phase of a resonator circuit, consisting of a capacitor (Csh) and a superconducting temperature dependent inductor where the said inductor is thermally isolated from the heat bath (chip substrate) by micro-suspensions. The bolometer design includes a thin film inductor located on the membrane, a single or/and multi-layered thin film capacitor, and a thin film absorber of incoming radiation. The bolometer design can also include a lithographic antenna with antenna termination and/or a back reflector beneath the membrane for optimal wavelength detection by the resonance circuit. The superconducting thermal detector (bolometer) and arrays of these detectors operate in a temperature range from 1 Kelvin to 10 Kelvin.

Abstract translation: 基于感测谐振器电路的幅度或相位的变化的THz（亚毫米）波辐射的超导热探测器（辐射热计），由电容器（Csh）和超导温度依赖电感器组成，其中所述电感器是热的 通过微悬浮液从热浴（芯片基板）分离。 测辐射热计设计包括位于膜上的薄膜电感器，单层或/和多层薄膜电容器和进入辐射的薄膜吸收器。 测辐射热计设计还可以包括具有天线终端的光刻天线和/或膜下方的后反射器，用于谐振电路的最佳波长检测。 超导热探测器（测辐射热计）和这些探测器的阵列在1开尔文到10开尔文的温度范围内工作。