- 专利标题： MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFACTURE
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申请号： US14883836申请日： 2015-10-15
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公开(公告)号： US20160035512A1公开(公告)日： 2016-02-04
- 发明人: Stephen E. LUCE , Anthony K. STAMPER
- 申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 主分类号： H01H11/00
- IPC分类号： H01H11/00 ; H01H59/00 ; B81C1/00
摘要：
MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.
公开/授权文献
- US09824834B2 Method of manufacturing MEMS switches with reduced voltage 公开/授权日：2017-11-21
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