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公开(公告)号：US20160035512A1
公开(公告)日：2016-02-04
申请号：US14883836
申请日：2015-10-15
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Stephen E. LUCE , Anthony K. STAMPER
CPC classification number: B81C1/00698 , B81C1/0015 , B81C1/00166 , B81C1/00523 , B81C2201/0132 , B81C2201/0133 , B81C2201/0145 , B81C2201/0154 , B81C2203/0145 , H01H1/0036 , H01H1/58 , H01H11/00 , H01H49/00 , H01H59/00 , H01H59/0009 , H01H2059/0018 , Y10T29/49105
Abstract: MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.
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2.发明申请公开(公告)号：US20150200069A1
公开(公告)日：2015-07-16
申请号：US14670671
申请日：2015-03-27
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Stephen E. LUCE , Anthony K. STAMPER
CPC classification number: B81C1/00698 , B81C1/0015 , B81C1/00166 , B81C1/00523 , B81C2201/0132 , B81C2201/0133 , B81C2201/0145 , B81C2201/0154 , B81C2203/0145 , H01H1/0036 , H01H1/58 , H01H11/00 , H01H49/00 , H01H59/00 , H01H59/0009 , H01H2059/0018 , Y10T29/49105
Abstract: MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.
Abstract translation: 提供MEMS开关和制造MEMS开关的方法。 所述MEMS开关具有至少两个悬臂电极，所述至少两个悬臂电极具有重叠的端部，并且在被至少一个固定电极施加电压时被构造和可操作以彼此接触。
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公开(公告)号：US20160035513A1
公开(公告)日：2016-02-04
申请号：US14883843
申请日：2015-10-15
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Stephen E. LUCE , Anthony K. STAMPER
CPC classification number: B81C1/00698 , B81C1/0015 , B81C1/00166 , B81C1/00523 , B81C2201/0132 , B81C2201/0133 , B81C2201/0145 , B81C2201/0154 , B81C2203/0145 , H01H1/0036 , H01H1/58 , H01H11/00 , H01H49/00 , H01H59/00 , H01H59/0009 , H01H2059/0018 , Y10T29/49105
Abstract: MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.
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公开(公告)号：US20160035510A1
公开(公告)日：2016-02-04
申请号：US14883745
申请日：2015-10-15
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Stephen E. LUCE , Anthony K. STAMPER
CPC classification number: B81C1/00698 , B81C1/0015 , B81C1/00166 , B81C1/00523 , B81C2201/0132 , B81C2201/0133 , B81C2201/0145 , B81C2201/0154 , B81C2203/0145 , H01H1/0036 , H01H1/58 , H01H11/00 , H01H49/00 , H01H59/00 , H01H59/0009 , H01H2059/0018 , Y10T29/49105
Abstract: MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.
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公开(公告)号：US20130192964A1
公开(公告)日：2013-08-01
申请号：US13826070
申请日：2013-03-14
Applicant: International Business Machines Corporation
Inventor： Stephen E. LUCE , Anthony K. STAMPER
CPC classification number: B81C1/00698 , B81C1/0015 , B81C1/00166 , B81C1/00523 , B81C2201/0132 , B81C2201/0133 , B81C2201/0145 , B81C2201/0154 , B81C2203/0145 , H01H1/0036 , H01H1/58 , H01H11/00 , H01H49/00 , H01H59/00 , H01H59/0009 , H01H2059/0018 , Y10T29/49105
Abstract: MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.
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Patent Agency Ranking
公开(公告)号：US20180093884A1
公开(公告)日：2018-04-05
申请号：US15809066
申请日：2017-11-10
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Stephen E. LUCE , Anthony K. STAMPER
CPC classification number: B81C1/00698 , B81C1/0015 , B81C1/00166 , B81C1/00523 , B81C2201/0132 , B81C2201/0133 , B81C2201/0145 , B81C2201/0154 , B81C2203/0145 , H01H1/0036 , H01H1/58 , H01H11/00 , H01H49/00 , H01H59/00 , H01H59/0009 , H01H2059/0018 , Y10T29/49105
Abstract: An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode, forming a second cantilevered electrode over an electrode and operable to contact the first cantilevered electrode upon an application of a voltage to the electrode, and forming an arm on the first cantilevered electrode with an extending protrusion extending upward from an upper surface of the arm.
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公开(公告)号：US20180016137A1
公开(公告)日：2018-01-18
申请号：US15717187
申请日：2017-09-27
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Stephen E. LUCE , Anthony K. STAMPER
CPC classification number: B81C1/00698 , B81C1/0015 , B81C1/00166 , B81C1/00523 , B81C2201/0132 , B81C2201/0133 , B81C2201/0145 , B81C2201/0154 , B81C2203/0145 , H01H1/0036 , H01H1/58 , H01H11/00 , H01H49/00 , H01H59/00 , H01H59/0009 , H01H2059/0018 , Y10T29/49105
Abstract: An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode over a first fixed electrode, forming a second cantilevered electrode with an end that overlaps the first cantilevered electrode, forming a third cantilevered electrode operable to directly contact the first cantilevered electrode upon an application of a voltage to a second fixed electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.
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公开(公告)号：US20160145097A1
公开(公告)日：2016-05-26
申请号：US15012314
申请日：2016-02-01
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Stephen E. LUCE , Anthony K. STAMPER
IPC: B81C1/00
CPC classification number: B81C1/00698 , B81C1/0015 , B81C1/00166 , B81C1/00523 , B81C2201/0132 , B81C2201/0133 , B81C2201/0145 , B81C2201/0154 , B81C2203/0145 , H01H1/0036 , H01H1/58 , H01H11/00 , H01H49/00 , H01H59/00 , H01H59/0009 , H01H2059/0018 , Y10T29/49105
Abstract: MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.
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公开(公告)号：US20180016138A1
公开(公告)日：2018-01-18
申请号：US15717234
申请日：2017-09-27
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Stephen E. LUCE , Anthony K. STAMPER
CPC classification number: B81C1/00698 , B81C1/0015 , B81C1/00166 , B81C1/00523 , B81C2201/0132 , B81C2201/0133 , B81C2201/0145 , B81C2201/0154 , B81C2203/0145 , H01H1/0036 , H01H1/58 , H01H11/00 , H01H49/00 , H01H59/00 , H01H59/0009 , H01H2059/0018 , Y10T29/49105
Abstract: An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode operable to directly contact a second fixed electrode upon an application of a voltage to a first fixed electrode, forming a second cantilevered electrode with an end that overlaps the first cantilevered electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.
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公开(公告)号：US20170294274A1
公开(公告)日：2017-10-12
申请号：US15627673
申请日：2017-06-20
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Stephen E. LUCE , Anthony K. STAMPER
Abstract: MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.
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