Invention Application
US20160035856A1 SEMICONDUCTOR STRUCTURE INCLUDING A FERROELECTRIC TRANSISTOR AND METHOD FOR THE FORMATION THEREOF 有权
包含电磁晶体管的半导体结构及其形成方法

SEMICONDUCTOR STRUCTURE INCLUDING A FERROELECTRIC TRANSISTOR AND METHOD FOR THE FORMATION THEREOF
Abstract:
An illustrative semiconductor structure described herein includes a substrate including a logic transistor region, a ferroelectric transistor region and an input/output transistor region. A logic transistor is provided at the logic transistor region. The logic transistor includes a gate dielectric and a gate electrode. An input/output transistor is provided at the input/output transistor region. The input/output transistor includes a gate dielectric and a gate electrode. The gate dielectric of the input/output transistor has a greater thickness than the gate dielectric of the logic transistor. A ferroelectric transistor is provided at the ferroelectric transistor region. The ferroelectric transistor includes a ferroelectric dielectric and a gate electrode. The ferroelectric dielectric is arranged between the ferroelectric transistor region and the gate electrode of the ferroelectric transistor.
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