发明申请
- 专利标题: WAFER LEVEL PACKAGING OF INFRARED CAMERA DETECTORS
- 专利标题(中): 红外相机检测器的水平包装
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申请号: US13750709申请日: 2013-01-25
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公开(公告)号: US20160047691A1公开(公告)日: 2016-02-18
- 发明人: Gregory A. Carlson , Alex Matson , Andrew Sharpe , Davey Beard , Paul Schweikert , Robert Simes
- 申请人: FLIR Systems, Inc.
- 申请人地址: US OR Wilsonville
- 专利权人: FLIR Systems, Inc.
- 当前专利权人: FLIR Systems, Inc.
- 当前专利权人地址: US OR Wilsonville
- 主分类号: G01J5/10
- IPC分类号: G01J5/10 ; H01L27/146 ; G01J1/02 ; G01J1/44 ; G01J5/02
摘要:
An infrared detector useful in, e.g., infrared cameras, includes a substrate having an array of infrared detectors and a readout integrated circuit interconnected with the array disposed on an upper surface thereof, for one or more embodiments. A generally planar window is spaced above the array, the window being substantially transparent to infrared light. A mesa is bonded to the window. The mesa has closed marginal side walls disposed between an outer periphery of a lower surface of the window and an outer periphery of the upper surface of the substrate and defines a closed cavity between the window and the array that encloses the array. A solder seal bonds the mesa to the substrate so as to seal the cavity.
公开/授权文献
- US09513172B2 Wafer level packaging of infrared camera detectors 公开/授权日:2016-12-06
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