Invention Application
US20160052084A1 LASER MACHINING DEVICE AND LASER MACHINING METHOD 审中-公开
激光加工设备和激光加工方法

LASER MACHINING DEVICE AND LASER MACHINING METHOD
Abstract:
The laser processing device comprises a laser light source emitting a laser light, a converging optical system converging the laser light at an object to be processed, and an aberration providing part for imparting an aberration to the laser light converged at the object by the converging optical system. In an optical axis direction of the laser light, letting a reference aberration range be a range of a converging-induced aberration as an aberration occurring at a position where the laser light is converged as a result of converging the laser light at the object, the aberration providing part imparts a first aberration to the laser light such that the laser light has an elongated range longer than the reference aberration range in the optical axis direction as an aberration range and an intensity distribution in the optical axis direction with a continuous undulation in the elongated range.
Public/Granted literature
Information query
Patent Agency Ranking
0/0