Invention Application
- Patent Title: LATERAL BIPOLAR JUNCTION TRANSISTORS ON A SILICON-ON-INSULATOR SUBSTRATE WITH A THIN DEVICE LAYER THICKNESS
- Patent Title (中): 具有薄膜厚度的绝缘子硅衬底上的侧向双极晶体管
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Application No.: US14476007Application Date: 2014-09-03
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Publication No.: US20160064484A1Publication Date: 2016-03-03
- Inventor: David L. Harame , Michael L. Kerbaugh , Qizhi Liu
- Applicant: GLOBALFOUNDRIES INC.
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/08 ; H01L27/12 ; H01L21/84 ; H01L29/66 ; H01L29/732

Abstract:
Methods of forming bipolar device structures and bipolar device structures. An opening may be formed in a device layer of a silicon-on-insulator substrate that extends to a buried insulator layer of the silicon-on-insulator substrate. An intrinsic base layer may be grown within the device layer opening by lateral growth on opposite first and second sidewalls of the device layer bordering the opening. A first collector of a first bipolar junction transistor of the device structure may be formed at a first spacing from the first sidewall. A second collector of a second bipolar junction transistor of the device structure may be formed at a second spacing from the second sidewall. An emitter, which is shared by the first bipolar junction transistor and the second bipolar transistor, is formed inside the opening. Portions of the intrinsic base layer may supply respective intrinsic bases for the first and second bipolar junction transistors.
Public/Granted literature
- US09553145B2 Lateral bipolar junction transistors on a silicon-on-insulator substrate with a thin device layer thickness Public/Granted day:2017-01-24
Information query
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