Invention Application
- Patent Title: VIBRATING DEVICE
- Patent Title (中): 振动装置
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Application No.: US14939270Application Date: 2015-11-12
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Publication No.: US20160064642A1Publication Date: 2016-03-03
- Inventor: TOSHIO NISHIMURA , Keiichi Umeda , Takashi Hase , Keisuke Takeyama , Takehiko Kishi , Hiroshi Yamada
- Applicant: Murata Manufacturing Co., Ltd.
- Priority: JP2013-101301 20130513
- Main IPC: H01L41/09
- IPC: H01L41/09 ; H01L41/047 ; H01L41/083

Abstract:
A vibrating device that is in the form of a rectangular plate having opposed long sides and opposed short sides, and that utilizes an expanding and contracting vibration mode in a direction of the short sides. The vibrating device includes a Si layer made of a degenerate semiconductor, a silicon oxide layer, a piezoelectric layer, and first and second electrodes through which a voltage is applied to the piezoelectric layer. When a total thickness of the Si layer is denoted by T1, a total thickness of the silicon oxide layer is denoted by T2, and the TCF in the vibrating device when the silicon oxide layer 3 is not provided is denoted by x(ppm/K), T2/(T1+T2) is within a range of (−0.0003x2−0.0256x+0.0008)±0.05.
Public/Granted literature
- US09905748B2 Vibrating device Public/Granted day:2018-02-27
Information query
IPC分类: