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公开(公告)号：US20180048285A1
公开(公告)日：2018-02-15
申请号：US15690570
申请日：2017-08-30
发明人： TOSHIO NISHIMURA , Yuichi Goto , Kentaro Yoshii , Ville Kaajakari
IPC分类号： H03H9/13 , H01L41/047 , H03H9/17
CPC分类号： H03H9/13 , H01L41/0471 , H01L41/0475 , H03H9/02275 , H03H9/0595 , H03H9/1057 , H03H9/17 , H03H9/2452
摘要： A resonator with stabilized resonant frequency that includes a lower electrode, a plurality of upper electrodes, and a piezoelectric film disposed between the lower electrode and the plurality of upper electrodes. Moreover, an upper lid having a first and second opposing surfaces is provided so that the first surface faces and seals a first surface of the resonator. In addition, a lower lid having a first and second opposing surfaces is provided so that the first surface faces and seals a second surface of the resonator. The resonator further includes a power terminal electrically connected to the upper electrodes and a ground terminal provided on the second surface of the upper lid. The lower electrode is electrically connected to the ground terminal by the upper lid.
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公开(公告)号：US20170069822A1
公开(公告)日：2017-03-09
申请号：US15357218
申请日：2016-11-21
发明人： TOSHIO NISHIMURA
IPC分类号： H01L41/053 , H01L41/107
CPC分类号： H01L41/053 , H01L41/107 , H03H9/02228 , H03H9/02338
摘要： A vibrating device includes a vibration plate that vibrates at a harmonic of a contour vibration and on which plural vibration members to are disposed. Moreover, support members are provided having first ends connected to the vibration plate and second ends connected to a frame base that surrounds the vibration plate. Cavities extending in a direction that intersects a direction in which the support members extend are formed in the base with flexure-vibration members formed therebetween. Both ends of the flexure-vibration members are joined to the base to serve as stationary ends. Moreover, a length between ends of the flexure-vibration members and a connected portion where each of the flexure-vibration member is connected to the corresponding support members is λ/4, where λ is a wave length of a flexural vibration corresponding to a frequency of a natural vibration in the vibration plate.
摘要翻译： 振动装置包括以轮廓振动的谐波振动并且配置有多个振动部件的振动板。 此外，支撑构件设置有第一端连接到振动板，第二端连接到围绕振动板的框架基座。 在与支撑构件延伸的方向相交的方向上延伸的腔室形成在基部中，其间形成有挠曲振动构件。 弯曲振动件的两端连接到基座上以用作固定端。 此外，挠曲振动部件的端部与挠曲振动部件连接到对应的支撑部件的连接部分之间的长度为λ/ 4，其中λ为对应于频率的挠曲振动的波长 在振动板上产生自然振动。
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公开(公告)号：US20160329877A1
公开(公告)日：2016-11-10
申请号：US15211055
申请日：2016-07-15
发明人： TOSHIO NISHIMURA , Keiichi Umeda , Ville Kaajakari
CPC分类号： H03H9/02244 , H03H9/0595 , H03H9/125 , H03H9/2489 , H03H2009/155
摘要： A piezoelectric vibrator that includes first and second vibration portions that vibrate with mutually reverse phases. Each of the vibration portions includes a silicon layer, a first piezoelectric layer and a second piezoelectric layer that has polarization in an opposite direction to a direction of polarization of the first piezoelectric layer. First and second electrodes are disposed on opposite sides of the second piezoelectric layer. The piezoelectric vibrator has a structure such that a first potential is applied to the first electrode of the first vibration portion and the second electrode of the second vibration portion, and a second potential is applied to the second electrode of the first vibration portion and the first electrode of the second vibration portion.
摘要翻译： 一种压电振动器，包括相互相反的振动的第一振动部和第二振动部。 每个振动部分包括具有与第一压电层的偏振方向相反的方向的极化的硅层，第一压电层和第二压电层。 第一和第二电极设置在第二压电层的相对侧上。 压电振子具有第一电位施加到第一振动部的第一电极和第二振动部的第二电极的结构，第二电位施加到第一振动部的第二电极，第一电位施加到第一振动部的第二电极 电极。
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公开(公告)号：US20160065173A1
公开(公告)日：2016-03-03
申请号：US14937026
申请日：2015-11-10
发明人： TOSHIO NISHIMURA , Takashi Hase , Keisuke Takeyama , Hiroaki Kaida , Keiichi Umeda , Takehiko Kishi , Hiroshi Yamada
IPC分类号： H03H9/21 , H01L41/047
CPC分类号： H03H9/21 , H01L41/0478
摘要： A vibrating device having tuning fork arms extending in a first direction that are joined to a base portion and are arranged side by side in an second direction. Each of the tuning fork arms has a structure that a silicon oxide layer is laminated on a Si layer made of a degenerate semiconductor, and that an excitation portion is provided on the silicon oxide layer. When a total thickness of the Si layer is denoted by T1, a total thickness of the silicon oxide layer is denoted by T2, and the temperature coefficient of resonant frequency (TCF) when the silicon oxide layer is not provided on the Si layer is denoted by x, a thickness ratio T2/(T1+T2) is within a range of (−0.0002x2−0.0136x+0.0014)±0.05.
摘要翻译： 一种振动装置，其具有沿第一方向延伸的音叉臂，所述音叉臂连接到基部并沿第二方向并排设置。 每个音叉臂具有在由简并半导体制成的Si层上层叠氧化硅层的结构，并且在氧化硅层上设置激发部。 当Si层的总厚度由T1表示时，氧化硅层的总厚度由T2表示，并且在Si层上未设置氧化硅层时的共振频率（TCF）的温度系数表示为 通过x，厚度比T2 /（T1 + T2）在（-0.0002x2-0.0136x + 0.0014）±0.05的范围内。
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公开(公告)号：US20160064642A1
公开(公告)日：2016-03-03
申请号：US14939270
申请日：2015-11-12
发明人： TOSHIO NISHIMURA , Keiichi Umeda , Takashi Hase , Keisuke Takeyama , Takehiko Kishi , Hiroshi Yamada
IPC分类号： H01L41/09 , H01L41/047 , H01L41/083
CPC分类号： H01L41/09 , H01L41/047 , H01L41/083 , H03H9/02448 , H03H9/0595 , H03H9/2452 , H03H2009/155
摘要： A vibrating device that is in the form of a rectangular plate having opposed long sides and opposed short sides, and that utilizes an expanding and contracting vibration mode in a direction of the short sides. The vibrating device includes a Si layer made of a degenerate semiconductor, a silicon oxide layer, a piezoelectric layer, and first and second electrodes through which a voltage is applied to the piezoelectric layer. When a total thickness of the Si layer is denoted by T1, a total thickness of the silicon oxide layer is denoted by T2, and the TCF in the vibrating device when the silicon oxide layer 3 is not provided is denoted by x(ppm/K), T2/(T1+T2) is within a range of (−0.0003x2−0.0256x+0.0008)±0.05.
摘要翻译： 一种振动装置，其形式为矩形板，具有相对的长边和相对的短边，并且在短边方向上使用伸缩振动模式。 振动装置包括由简并半导体制成的Si层，氧化硅层，压电层以及施加电压到压电层的第一和第二电极。 当Si层的总厚度由T1表示时，氧化硅层的总厚度由T2表示，当未设置氧化硅层3时的振动装置中的TCF表示为x（ppm / K ），T2 /（T1 + T2）在（-0.0003x2-0.0256x + 0.0008）±0.05的范围内。
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