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公开(公告)号:US11750173B2
公开(公告)日:2023-09-05
申请号:US17023861
申请日:2020-09-17
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Ryota Kawai , Keisuke Takeyama , Yuichi Goto
CPC classification number: H03H9/2457 , H03H9/02448 , H03H9/0595 , H03H9/1057
Abstract: A resonance device includes a resonator, an upper lid, and a lower lid. The resonator includes a vibration portion, a frame, and holding arms. The vibration portion includes a base and a plurality of vibration arms. The lower lid has a protruding portion protruding between two adjacent vibration arms, the protruding portion has an insulating film, the vibration arms have a weight portion that has a conductive film formed on the insulating film, and in a direction in which the plurality of vibration arms extend, a first distance between the weight portion of any one of the two adjacent vibration arms and the holding portion is less than a second distance between the weight portion and the protruding portion.
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公开(公告)号:US10749496B2
公开(公告)日:2020-08-18
申请号:US16188865
申请日:2018-11-13
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Kentaro Yoshii , Yuichi Goto , Keisuke Takeyama , Toshio Nishimura , Shungo Morinaga , Ryota Kawai , Yoshihisa Inoue
Abstract: A resonator is provided having a first electrode and a second electrode; and a piezoelectric film that is disposed between the first and second electrodes, has an upper surface opposing the first electrode, and that vibrates in a predetermined vibration mode when a voltage is applied between the first and second electrodes. Moreover, the resonator includes a protective film made of an insulator and disposed opposing the upper surface of the piezoelectric film with the first electrode interposed therebetween. Furthermore, a conductive film made of a conductor is provided that is disposed opposing the upper surface of the piezoelectric film with the protective film interposed therebetween, where the conductive film is electrically connected to any one of the first and second electrodes.
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公开(公告)号:US10333486B2
公开(公告)日:2019-06-25
申请号:US15206647
申请日:2016-07-11
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Keisuke Takeyama , Daisuke Nakamura , Eitaro Kameda , Hiroaki Kaida
Abstract: A piezoelectric vibrator that includes a piezoelectric film with a pair of electrodes disposed on opposing sides of the piezoelectric film. Moreover, the vibrator includes first and second adjustment films with the first adjustment film covering the first surface of the piezoelectric film in a first region and the second adjustment film covering the first surface of the piezoelectric film in a second region that is different from the first region. Moreover, the second region of the piezoelectric film has a greater displacement than the first region when the piezoelectric vibrator vibrates.
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公开(公告)号:US09905748B2
公开(公告)日:2018-02-27
申请号:US14939270
申请日:2015-11-12
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Toshio Nishimura , Keiichi Umeda , Takashi Hase , Keisuke Takeyama , Takehiko Kishi , Hiroshi Yamada
IPC: H03H9/02 , H01L41/09 , H03H9/05 , H03H9/24 , H01L41/047 , H01L41/083 , H03H9/15
CPC classification number: H01L41/09 , H01L41/047 , H01L41/083 , H03H9/02448 , H03H9/0595 , H03H9/2452 , H03H2009/155
Abstract: A vibrating device that is in the form of a rectangular plate having opposed long sides and opposed short sides, and that utilizes an expanding and contracting vibration mode in a direction of the short sides. The vibrating device includes a Si layer made of a degenerate semiconductor, a silicon oxide layer, a piezoelectric layer, and first and second electrodes through which a voltage is applied to the piezoelectric layer. When a total thickness of the Si layer is denoted by T1, a total thickness of the silicon oxide layer is denoted by T2, and the TCF in the vibrating device when the silicon oxide layer 3 is not provided is denoted by x(ppm/K), T2/(T1+T2) is within a range of (−0.0003x2−0.0256x+0.0008)±0.05.
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公开(公告)号:US12107564B2
公开(公告)日:2024-10-01
申请号:US17749736
申请日:2022-05-20
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Keisuke Takeyama , Toshio Nishimura
CPC classification number: H03H9/2452 , H03H9/0595 , H03H9/1057
Abstract: A resonator is provided that includes a vibrator with two portions that vibrate in phases opposite to each other; a frame that is disposed to surround at least part of the vibrator; and a holding unit that supports a boundary between the two portions and connects the vibrator to the frame. Moreover, a frequency adjustment film is disposed on a surface of the vibrator in an area between a connection portion of the holding unit connected to the vibrator and an end of the vibrator that faces the connection portion in a direction along the boundary between the two portions.
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公开(公告)号:US20210159884A1
公开(公告)日:2021-05-27
申请号:US17164287
申请日:2021-02-01
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Yuichi Goto , Keisuke Takeyama
Abstract: A resonance device that includes a lower cover, an upper cover joined to the lower cover, a resonator having vibrating arms that bend and vibrate in a vibration space between the lower cover and the upper cover, and particles attached to tip portions of the vibrating arms. When a median size of the particle is defined as D50, a specific gravity of the particle is defined as A, and a resonant frequency of the resonator is defined as X, D50≤189/(X×√A).
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公开(公告)号:US20190097600A1
公开(公告)日:2019-03-28
申请号:US16188865
申请日:2018-11-13
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Kentaro Yoshii , Yuichi Goto , Keisuke Takeyama , Toshio Nishimura , Shungo Morinaga , Ryota Kawai , Yoshihisa Inoue
CPC classification number: H03H9/02141 , H03H3/0077 , H03H9/0595 , H03H9/1014 , H03H9/1057 , H03H9/21 , H03H9/2489 , H03H2009/155
Abstract: A resonator is provided having a first electrode and a second electrode; and a piezoelectric film that is disposed between the first and second electrodes, has an upper surface opposing the first electrode, and that vibrates in a predetermined vibration mode when a voltage is applied between the first and second electrodes. Moreover, the resonator includes a protective film made of an insulator and disposed opposing the upper surface of the piezoelectric film with the first electrode interposed therebetween. Furthermore, a conductive film made of a conductor is provided that is disposed opposing the upper surface of the piezoelectric film with the protective film interposed therebetween, where the conductive film is electrically connected to any one of the first and second electrodes.
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公开(公告)号:US20160072473A1
公开(公告)日:2016-03-10
申请号:US14933336
申请日:2015-11-05
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Toshio Nishimura , Takashi Hase , Keisuke Takeyama , Hiroaki Kaida , Keiichi Umeda , Takehiko Kishi , Hiroshi Yamada
IPC: H03H9/21
CPC classification number: H03H9/21
Abstract: A vibrating device having a number 2N (N is an integer equal to 2 or larger) of tuning fork arms extending in a first direction are arranged side by side in a second direction. Phases of flexural vibrations of the number N of tuning fork arms positioned at a first side of an imaginary line A, which passes a center of a region in the second direction where the number 2N of tuning fork arms are disposed and which extends in the first direction, are symmetric to phases of flexural vibrations of the number N of tuning fork arms positioned at a second side of the imaginary line opposite the first side.
Abstract translation: 具有沿第一方向延伸的音叉臂的数量为2N(N是等于2或更大的整数)的振动装置在第二方向上并排布置。 定位在假想线A的第一侧的音叉臂数量N的弯曲振动相位,该假想线A的第二方向的中心位于音叉臂的数目2N的第二方向上,并且在第一方向上延伸 方向,对称于位于与第一侧相对的假想线的第二侧的音叉臂数量N的弯曲振动的相位。
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公开(公告)号:US12255599B2
公开(公告)日:2025-03-18
申请号:US17568017
申请日:2022-01-04
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Eitaro Kameda , Keisuke Takeyama , Toshio Nishimura , Hiroshi Nakatani
Abstract: A piezoelectric resonator unit that includes a base, a cover, and a laminated structure disposed between the base and the cover. The laminated structure includes a piezoelectric resonator having a piezoelectric layer with a pair of principal surfaces facing each other, and a pair of excitation electrodes disposed on respective surfaces of the pair of principal surfaces so as to face each other with the piezoelectric layer therebetween, a semiconductor layer laminated on a side of one of the pair of principal surfaces of the piezoelectric layer, and a pair of measurement electrodes provided on the semiconductor layer. The pair of measurement electrodes measure signals based on temperature of the piezoelectric resonator through the semiconductor layer.
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公开(公告)号:US11876503B2
公开(公告)日:2024-01-16
申请号:US17164287
申请日:2021-02-01
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Yuichi Goto , Keisuke Takeyama
CPC classification number: H03H9/2457 , H03H9/1057
Abstract: A resonance device that includes a lower cover, an upper cover joined to the lower cover, a resonator having vibrating arms that bend and vibrate in a vibration space between the lower cover and the upper cover, and particles attached to tip portions of the vibrating arms. When a median size of the particle is defined as D50, a specific gravity of the particle is defined as A, and a resonant frequency of the resonator is defined as X, D50≤189/(X×√A).
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