Invention Application
- Patent Title: COBALT DISHING CONTROL AGENTS
- Patent Title (中): COBALT DISHING控制剂
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Application No.: US14919490Application Date: 2015-10-21
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Publication No.: US20160108285A1Publication Date: 2016-04-21
- Inventor: Steven Kraft , Andrew Wolff , Phillip W. Carter
- Applicant: Cabot Microelectronics Corporation
- Main IPC: C09G1/02
- IPC: C09G1/02 ; H01L21/321 ; B24B37/04

Abstract:
The invention provides a chemical-mechanical polishing composition comprising (a) abrasive particles, (b) a cobalt corrosion inhibitor, (c) a cobalt dishing control agent, wherein the cobalt dishing control agent comprises an anionic head group and a C13-C20 aliphatic tail group, (d) an oxidizing agent that oxidizes cobalt, and (e) water, wherein the polishing composition has a pH of about 3 to about 8.5. The invention further provides a method of chemically-mechanically polishing a substrate with the inventive chemical-mechanical polishing composition. Typically, the substrate contains cobalt.
Public/Granted literature
- US09834704B2 Cobalt dishing control agents Public/Granted day:2017-12-05
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