Invention Application
US20160108554A1 METHOD FOR MANUFACTURING ALUMINUM-BASED GROUP III NITRIDE SINGLE CRYSTAL
有权
用于制造铝基III族氮化物单晶的方法
- Patent Title: METHOD FOR MANUFACTURING ALUMINUM-BASED GROUP III NITRIDE SINGLE CRYSTAL
- Patent Title (中): 用于制造铝基III族氮化物单晶的方法
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Application No.: US14892875Application Date: 2014-06-10
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Publication No.: US20160108554A1Publication Date: 2016-04-21
- Inventor: Akinori KOUKITSU , Yoshinao KUMAGAI , Toru NAGASHIMA , Reiko OKAYAMA
- Applicant: TOKUYAMA CORPORATION
- Priority: JP2013-121889 20130610
- International Application: PCT/JP2014/065390 WO 20140610
- Main IPC: C30B25/14
- IPC: C30B25/14 ; C30B29/40

Abstract:
The method for manufacturing an aluminum-based group III nitride single crystal includes the step of supplying an aluminum halide gas and a nitrogen source gas onto a base substrate, such that a reaction of the aluminum halide gas and the nitrogen source gas is conducted on the base substrate, wherein the reaction of the aluminum halide gas and the nitrogen source gas is conducted under coexistence of a halogen-based gas such that a halogen-based gas ratio (H) represented by the following formula (1) is no less than 0.1 and less than 1.0: H=VH/I(VH+VAl) (1) (In the formula (1), VH represents a supply of the halogen-based gas; and VAl represents a supply of the aluminum halide gas); and a growth rate of the aluminum-based group III nitride single crystal is no less than 10 μm/h.
Public/Granted literature
- US09708733B2 Method for manufacturing aluminum-based group III nitride single crystal by hydride vapor phase epitaxy Public/Granted day:2017-07-18
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