Invention Application
US20160138158A1 NOZZLE AND SUBSTRATE PROCESSING APPARATUS USING SAME 审中-公开
喷嘴和底板加工设备使用相同

NOZZLE AND SUBSTRATE PROCESSING APPARATUS USING SAME
Abstract:
A nozzle for supplying a fluid includes a tubular part including a tubular passage thereinside and a fluid discharge surface having a plurality of fluid discharge holes formed therein along a lengthwise direction of the tubular passage. A partition plate is provided in the tubular passage and extends along the lengthwise direction so as to partition the tubular passage into a first area including the fluid discharge surface and a second area without the fluid discharge surface. The partition plate has distribution holes whose number is less than a number of the plurality of fluid discharge holes in the lengthwise direction. A fluid introduction passage is in communication with the second area.
Public/Granted literature
Information query
Patent Agency Ranking
0/0