发明申请
- 专利标题: METHOD FOR SPUTTERING SYSTEM AND USING COUNTERWEIGHT
- 专利标题(中): 溅射系统和使用方法
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申请号: US15053997申请日: 2016-02-25
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公开(公告)号: US20160177438A1公开(公告)日: 2016-06-23
- 发明人: Vinay Shah , Alexandru Riposan , Terry Bluck
- 申请人: Intevac, Inc.
- 主分类号: C23C14/35
- IPC分类号: C23C14/35 ; H01J37/34 ; C23C14/56
摘要:
A method for depositing material from a target onto substrates, comprising using a processing chamber; a sputtering target having length L and having sputtering material provided on front surface thereof; a magnet operable to reciprocally scan across the length L in close proximity to rear surface of the target; and a counterweight operable to reciprocally scan at same speed but opposite direction of the magnet; and moving the magnets at speeds at least several times faster than the speed of the substrates.
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