发明申请
US20160202609A1 DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD 审中-公开
开发治疗设备和开发治疗方法

DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD
摘要:
The present invention is a developing treatment apparatus for performing development by supplying a developing solution to a substrate having a front surface coated with a positive resist or a negative resist and then subjected to exposure wherein a movable cup is raised to introduce one of scattering developing solutions for the positive and negative resists into an inner peripheral flow path of a cup and the movable cup is lowered to introduce the other of scattering developing solutions for the positive and negative resists into an outer peripheral flow path of the cup, and the developing solution introduced into the inner peripheral flow path and the developing solution introduced into the outer peripheral flow path are separately drained.
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