发明申请
- 专利标题: MULTI-SOURCE GIS FOR PARTICLE-OPTICAL APPARATUS
- 专利标题(中): 用于颗粒光学设备的多源GIS
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申请号: US15052716申请日: 2016-02-24
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公开(公告)号: US20160244871A1公开(公告)日: 2016-08-25
- 发明人: Johannes Jacobus Lambertus Mulders , Petrus Hubertus Franciscus Trompenaars , Pleun Dona
- 申请人: FEI Company
- 申请人地址: US OR Hillsboro
- 专利权人: FEI Company
- 当前专利权人: FEI Company
- 当前专利权人地址: US OR Hillsboro
- 优先权: EP15156537.1 20150225
- 主分类号: C23C14/22
- IPC分类号: C23C14/22 ; B05B1/14 ; B05B7/24 ; B05B1/00
摘要:
A Gas Injection System (GIS) applies at least two fluids in the vacuum chamber of a particle-optical apparatus, the gas injection system having two or more channels. Each channel is connected to an associated reservoir holding a fluid at a first side and having an associated exit opening at the other side, the exit sides individually exiting to the outside of the GIS via a nozzle with a nozzle opening. At least two exit openings separated by less than the diameter of the channels near the exit openings, preferably concentric to each other.
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