Invention Application
US20160327392A1 Robust Inertial Sensors 审中-公开
强大的惯性传感器

Robust Inertial Sensors
Abstract:
In one embodiment, a sensor includes a rigid wafer outer body, a first cavity located within the rigid wafer outer body, a first spring supported by the rigid wafer outer body and extending into the first cavity, a second spring supported by the rigid wafer outer body and extending into the first cavity, and a first sensor structure supported by the first spring and the second spring within the first cavity.
Public/Granted literature
Information query
Patent Agency Ranking
0/0