Invention Application
- Patent Title: Robust Inertial Sensors
- Patent Title (中): 强大的惯性传感器
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Application No.: US15108414Application Date: 2014-12-30
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Publication No.: US20160327392A1Publication Date: 2016-11-10
- Inventor: Bonsang Kim , Ando Feyh , Andrew Graham , Gary O'Brien , Michael Baus , Ralf Maier , Mariusz Koc
- Applicant: Bonsang Kim , Ando Feyh , Andrew Graham , Gary O'Brien , Michael Baus , Ralf Maier , Mariusz Koc , Robert Bosch GmbH
- International Application: PCT/US2014/072694 WO 20141230
- Main IPC: G01C19/5769
- IPC: G01C19/5769

Abstract:
In one embodiment, a sensor includes a rigid wafer outer body, a first cavity located within the rigid wafer outer body, a first spring supported by the rigid wafer outer body and extending into the first cavity, a second spring supported by the rigid wafer outer body and extending into the first cavity, and a first sensor structure supported by the first spring and the second spring within the first cavity.
Public/Granted literature
- US10317211B2 Robust inertial sensors Public/Granted day:2019-06-11
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