Invention Application
- Patent Title: OFFSET REJECTION ELECTRODES
- Patent Title (中): 偏移电极
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Application No.: US14714149Application Date: 2015-05-15
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Publication No.: US20160334438A1Publication Date: 2016-11-17
- Inventor: Matthew Julian THOMPSON , Kirt Reed WILLIAMS
- Applicant: InvenSense, Inc.
- Main IPC: G01P15/125
- IPC: G01P15/125 ; B81B7/00

Abstract:
A system and method for reducing offset in a MEMS sensor are disclosed. In a first aspect, the system is a MEMS sensor that comprises a sensing reference plane, at least one anchor coupled to the sensing reference plane, at least one proof mass coupled to the at least one anchor, wherein one of the at least one proof mass moves under an external excitation, a pattern of sensing elements coupled between the sensing reference plane and the at least one proof mass to detect motion normal to the sensing reference plane, wherein the pattern of sensing elements shares at least three axes of polarity anti-symmetry, and a signal processing circuit to combine the pattern of sensing elements thereby providing an output proportional to the external excitation. In a second aspect, the sensing reference plane is divided by two axes forming four quadrants on the sensing reference plane.
Public/Granted literature
- US09952252B2 Offset rejection electrodes Public/Granted day:2018-04-24
Information query
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