公开(公告)号：US20180196082A1

公开(公告)日：2018-07-12

申请号：US15916105

申请日：2018-03-08

Applicant: InvenSense, Inc.

Inventor： Matthew Julian THOMPSON ,  Kirt Reed WILLIAMS

IPC: G01P15/125 ,  B81B7/00 ,  G01P15/08

CPC classification number: G01P15/125 ,  B81B3/0086 ,  B81B7/0016 ,  B81B2201/025 ,  B81B2203/0307 ,  B81B2203/04 ,  G01P2015/0831

Abstract: A MEMS sensor that comprises a sensing reference plane, at least one anchor coupled to the sensing reference plane, wherein the sensing reference plane is divided by a first and a second axis forming four quadrants on the sensing reference plane, at least one proof mass coupled to the at least one anchor, wherein one of the at least one proof mass moves under an external excitation, and a pattern of sensing elements on the sensing reference plane to detect motion normal of the at least one proof mass relative to the sensing reference plane, wherein the pattern of sensing elements comprises at least three sensing elements in each of the four quadrants.

公开(公告)号：US20160214853A1

公开(公告)日：2016-07-28

申请号：US14608038

申请日：2015-01-28

Applicant: InvenSense, Inc.

Inventor： Matthew Julian THOMPSON ,  Joseph SEEGER

IPC: B81B3/00 ,  G01P15/125

CPC classification number: B81B3/0016 ,  B81B3/0037 ,  B81B2201/025 ,  B81B2203/0109 ,  B81B2203/0145 ,  B81B2203/053 ,  G01P15/125 ,  G01P2015/0837 ,  G01P2015/0854 ,  G01P2015/086

Abstract: A system and method for providing a MEMS sensor are disclosed. In a first aspect, the system is a MEMS sensor that comprises a substrate, an anchor region coupled to the substrate, at least one support arm coupled to the anchor region, at least two guiding arms coupled to and moving relative to the at least one support arm, a plurality of sensing elements disposed on the at least two guiding arms to measure motion of the at least two guiding arms relative to the substrate, and a proof mass system comprising at least one mass coupled to each of the at least two guiding arms by a set of springs. The proof mass system is disposed outside the anchor region, the at least one support arm, the at least two guiding arms, the set of springs, and the plurality of sensing elements.

Abstract translation: 公开了一种用于提供MEMS传感器的系统和方法。 在第一方面，该系统是MEMS传感器，其包括衬底，耦合到衬底的锚定区域，耦合到锚定区域的至少一个支撑臂，耦合到并相对于至少一个 支撑臂，设置在所述至少两个引导臂上的多个感测元件，以测量所述至少两个引导臂相对于所述基底的运动;以及证明质量系统，其包括耦合到所述至少两个引导件 武器由一套弹簧。 检测质量系统设置在锚定区域外部，至少一个支撑臂，至少两个引导臂，该组弹簧和多个感测元件。

公开(公告)号：US20200064369A1

公开(公告)日：2020-02-27

申请号：US16673602

申请日：2019-11-04

Applicant: InvenSense, Inc.

Inventor： Matthew Julian THOMPSON ,  Kirt Reed WILLIAMS

IPC: G01P15/125 ,  B81B7/00

Abstract: A MEMS sensor that comprises a sensing reference plane, at least one anchor coupled to the sensing reference plane, wherein the sensing reference plane is divided by a first and a second axis forming four quadrants on the sensing reference plane, at least one proof mass coupled to the at least one anchor, wherein one of the at least one proof mass moves under an external excitation, and a pattern of sensing elements on the sensing reference plane to detect motion normal of the at least one proof mass relative to the sensing reference plane, wherein the pattern of sensing elements comprises at least three sensing elements in each of the four quadrants.

公开(公告)号：US20190170786A1

公开(公告)日：2019-06-06

申请号：US16198626

申请日：2018-11-21

Applicant: InvenSense, Inc.

Inventor： Matthew Julian THOMPSON ,  Ali Shirvani

IPC: G01P15/125 ,  G01P15/13 ,  G01D5/241

Abstract: A MEMS system includes a proof mass, an anchor, an amplifier, first and second sense elements and their corresponding feedback elements. The proof mass moves responsive to a stimulus. The anchor coupled to the proof mass via a spring. The amplifier receives a proof mass signal from the proof mass and amplifies the signal to generate an output signal. The first sense element is connected between the proof mass and a first input signal and the second sense element is connected between the proof mass and a second input signal. The second input signal has a polarity opposite to the first input signal. The first feedback element is connected between the proof mass and the output signal and its charges change responsive to proof mass displacement. The second feedback element is connected between the proof mass and the output signal and its charges change in response to proof mass displacement.

公开(公告)号：US20150192603A1

公开(公告)日：2015-07-09

申请号：US14642529

申请日：2015-03-09

Applicant: InvenSense, Inc.

Inventor： Leonardo BALDASARRE ,  Matthew Julian THOMPSON

IPC: G01P15/125 ,  G01P15/18

CPC classification number: G01P15/125 ,  G01P2015/0837 ,  G01P2015/086

Abstract: A sensor is disclosed. The sensor includes a substrate and a mechanical structure. The mechanical structure includes at least two proof masses including a first proof mass and a second proof mass. The mechanical structure also includes a flexible coupling between the at least two proof masses and the substrate. The at least two proof masses move in an anti-phase direction normal to the plane of the substrate in response to acceleration of the sensor normal to the plane and move in anti-phase in a direction parallel to the plane of the substrate in response to an acceleration of the sensor parallel to the plane. The at least two proof masses move in a direction parallel to the plane of the substrate in response to an acceleration of the sensor parallel to the plane.

Abstract translation: 公开了一种传感器。 传感器包括基底和机械结构。 机械结构包括至少两个包括第一检验质量和第二检验质量的检验质量块。 所述机械结构还包括所述至少两个检验质量块和所述基板之间的柔性联接。 响应于垂直于平面的传感器的加速度，至少两个证明质量块在垂直于衬底的平面的反相方向上移动，并响应于平行于衬底的平面的方向在反相中移动 传感器平行于平面加速。 响应于平行于平面的传感器的加速度，至少两个检验质量块在平行于衬底的平面的方向上移动。

公开(公告)号：US20170260039A1

公开(公告)日：2017-09-14

申请号：US15609757

申请日：2017-05-31

Applicant: InvenSense, Inc.

Inventor： Matthew Julian THOMPSON ,  Antonio MOLFESE

IPC: B81B3/00 ,  G01P1/00 ,  G01P15/125

CPC classification number: G01P15/125 ,  B81B7/008 ,  G01P2015/0831

Abstract: A MEMS sensor includes a sensing reference plane, an anchor, a proof mass, and sensing elements. The anchor is coupled to the sensing reference plane and to the proof mass that moves under an external excitation. The sensing elements detect motion normal to the sensing reference plane. A summation of a product of polarity for each sensing element, its area, and its distance to the anchor on one side of an axis line is unequal to a summation of a product of a polarity associated with each sensing element, its associated area, and its distance to the anchor on another side of the axis line. As such, external excitation creates an offset. The offset is substantially constant for curvature angles)(0°-360°) of the sensing reference plane. The offset is greater than zero and is less than a maximum offset for a MEMS sensor with perfect symmetry for its sensing elements.

公开(公告)号：US20160334438A1

公开(公告)日：2016-11-17

申请号：US14714149

申请日：2015-05-15

Applicant: InvenSense, Inc.

Inventor： Matthew Julian THOMPSON ,  Kirt Reed WILLIAMS

IPC: G01P15/125 ,  B81B7/00

CPC classification number: G01P15/125 ,  B81B7/0016 ,  B81B2203/0307 ,  G01P2015/0831

Abstract: A system and method for reducing offset in a MEMS sensor are disclosed. In a first aspect, the system is a MEMS sensor that comprises a sensing reference plane, at least one anchor coupled to the sensing reference plane, at least one proof mass coupled to the at least one anchor, wherein one of the at least one proof mass moves under an external excitation, a pattern of sensing elements coupled between the sensing reference plane and the at least one proof mass to detect motion normal to the sensing reference plane, wherein the pattern of sensing elements shares at least three axes of polarity anti-symmetry, and a signal processing circuit to combine the pattern of sensing elements thereby providing an output proportional to the external excitation. In a second aspect, the sensing reference plane is divided by two axes forming four quadrants on the sensing reference plane.

Abstract translation: 公开了一种减小MEMS传感器偏移的系统和方法。 在第一方面，该系统是MEMS传感器，其包括感测参考平面，耦合到感测参考平面的至少一个锚固体，耦合到至少一个锚的至少一个证明块，其中至少一个证明中的一个 质量在外部激励下移动，感测元件的图案耦合在感测参考平面和至少一个证明质量块之间以检测垂直于感测参考平面的运动，其中感测元件的图案共享至少三个极性反转轴， 对称性和信号处理电路，以组合感测元件的图案，从而提供与外部激励成比例的输出。 在第二方面，感测参考平面由感测参考平面上形成四个象限的两个轴分开。

公开(公告)号：US20160094156A1

公开(公告)日：2016-03-31

申请号：US14501792

申请日：2014-09-30

Applicant: InvenSense, Inc.

Inventor： Matthew Julian THOMPSON ,  Michael DUEWEKE ,  Ilya GURIN ,  Joseph SEEGER

IPC: H02N11/00 ,  B81C1/00 ,  B81B7/02

CPC classification number: B81B3/0051 ,  B81B7/02 ,  B81B2203/0118 ,  H02N11/002

Abstract: A MEMS sensor is disclosed. The MEMS sensor includes a MEMS structure and a substrate coupled to the MEMS structure. The substrate includes a layer of metal and a layer of dielectric material. The MEMS structure moves in response to an excitation. A first over-travel stop is formed on the substrate at a first distance from the MEMS structure. A second over-travel stop on the substrate at a second distance from the MEMS structure. At least one electrode on the substrate at a third distance from the MEMS structure. The first, second and third distances are all different.

Abstract translation: 公开了一种MEMS传感器。 MEMS传感器包括耦合到MEMS结构的MEMS结构和衬底。 衬底包括金属层和电介质材料层。 MEMS结构响应于激发而移动。 在距离MEMS结构的第一距离处，在基板上形成第一超行程挡块。 在距离MEMS结构第二距离的基板上的第二超行程停止。 在距离MEMS结构三分之一距离的衬底上的至少一个电极。 第一，第二和第三距离都是不同的。