Invention Application
- Patent Title: SEMICONDUCTOR DEVICE HAVING CAPACITOR AND METHOD OF FABRICATING THE SEMICONDUCTOR DEVICE
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Application No.: US15229424Application Date: 2016-08-05
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Publication No.: US20170098652A1Publication Date: 2017-04-06
- Inventor: Sang-Yeol Kang , Ki-Vin Im , Youn-Soo Kim , Han-Jin Lim
- Applicant: Samsung Electronics Co., Ltd.
- Priority: KR10-2015-0139057 20151002
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L49/02

Abstract:
A semiconductor device having a capacitor includes a substrate which has a transistor, a first insulating pattern which is formed on the substrate and does not overlap a first contact node formed in the substrate, a second insulating pattern which is formed on the substrate, does not overlap a second contact node formed in the substrate, and is separated from the first insulating pattern, a first lower electrode which is formed on part of the substrate and sidewalls of the first insulating pattern, a second lower electrode which is formed on part of the substrate and sidewalls of the second insulating pattern, a dielectric layer pattern which is formed on the first lower electrode and the second lower electrode, and an upper electrode which is formed on the dielectric layer pattern. Related fabrication methods are also discussed.
Public/Granted literature
- US09716094B2 Semiconductor device having capacitor and method of fabricating the semiconductor device Public/Granted day:2017-07-25
Information query
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